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US 7,144,453 B2Granted
Composition for preparing porous dielectric thin film containing saccharides porogen
AssigneeSamsung Electronics Co., Ltd.
InventorsJin Heong Yim, Yi Yeol Lyu, Jung Bae Kim, Kwang Hee Lee
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Abstract
A composition for preparing a porous interlayer dielectric thin film which includes a saccharide or saccharide derivative, a thermo-stable organic or inorganic matrix precursor, and a solvent for dissolving the two solid components. Also provided is a dielectric thin film having evenly distributed nano-pores with a diameter of less than 50 Å, which is required for semiconductor devices.
Claims13
A composition for preparing substances having a porous interlayer dielectric thin film, said composition comprising:
- one or more of a monomeric saccharide derivative or an oligomeric saccharide derivative which is selected from the group consisting of monomeric saccharide derivatives represented by the following formulas (8) to (10), disaccharide derivatives represented by the following formulas (11) to (13) and a polymeric saccharide derivative represented by the following formula (14):
- in which R1, R2, R3, R4 and R5 are independently a C2-30 acyl group,
- in which, R1, R2, R3, R4, R5, R6, R7, and R8 are independently a C2-30 acyl group, or
- in which R1, R2, R3, R4, R5, R6, R7, R8, R9, R10 and R11 are independently a C2-30 acyl group;
- a thermo-stable organic or inorganic matrix precursor;
- and
- a solvent for dissolving both the saccharide derivative and the matrix precursor.
4 more elements
Dependencies are inferred from the claim text.