Piezoelectric element
AssigneesCanon Kabushiki Kaisha, Masaru Shimizu
InventorsToshihiro Ifuku, Kenichi Takeda, Tetsuro Fukui, Katsumi Aoki, Takanori Matsuda, Masaru Shimizu
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Abstract
A piezoelectric element including an upper electrode, a piezoelectric and/or electrostrictive material and a lower electrode, characterized in that the piezoelectric and/or electrostrictive material is a composite oxide constituted by ABO3 as general formula and the piezoelectric and/or electrostrictive material has a twin crystal.
Claims20
A piezoelectric element comprising an upper electrode, a piezoelectric and/or electrostrictive material and a lower electrode, wherein the piezoelectric and/or electrostrictive material is a composite oxide constituted by ABO3 as a general formula, the piezoelectric and/or electrostrictive material has a twin crystal structure, and the twin crystal structure has a twin crystal plane selected from a group represented by {110}.
A piezoelectric element comprising an upper electrode, a piezoelectric and/or electrostrictive material and a lower electrode, wherein the piezoelectric and/or electrostrictive material is a composite oxide constituted by ABO3 as a general formula, the piezoelectric and/or electrostrictive material has a twin crystal structure, and the twin crystal structure has a twin crystal plane selected from a group represented by {100}.
Dependencies are inferred from the claim text.