Bolometric detector, infrared detection device employing such a bolometric detector and process for fabricating this detector

Bolometric detector comprising:

• a sensitive part having
• one or more layers of a bolometric sensitive material consisting of at least one of an amorphous silicon and a related alloy of the SixGeyCz type in which x+y+z=1, the resistivity of which varies with temperature,
• electrodes isolated from one another, the electrodes acting as infrared radiation absorbers and being in contact with the sensitive material over at least part of their surface, and
• regions of sensitive material not in contact with the electrodes having at least one corrugation oriented along a direction perpendicular to a plane of the sensitive part, each corrugation having exposed surfaces defined by the sensitive material;
• at least one support region for supporting the sensitive part positioning the sensitive part, and acting as an electrical conductor, in relation to a read circuit associated with the bolometric detector;
• and
• at least one thermal insulation structure electrically and mechanically connecting each support region to the sensitive part.