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AssigneesBiomerieux, SNPE Materiaux Energetiques
InventorsPatrick Broyer, Bruno Colin, Denis Roller
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The invention concerns the technical field of micro-actuators used for mechanical, chemical, electrical or thermal functions in microsystems, for microelectronic applications such as chips, or biomedical functions such as microfluidics integrating cards. The invention concerns a micro-actuator comprising a so-called main chamber, made in a solid support and containing a so-called main pyrotechnic charge, the main chamber being sealed and delimited by solid support walls and by a deformable membrane, such that the gases emitted by the combustion of the main pyrotechnic charge, enable the volume of the chamber to be increased by deforming the membrane while maintaining intact the solid walls of the main chamber. The invention is characterized in that it comprises means for evacuating the gases from the main chamber.
A microactuator comprising a chamber, called the main chamber, produced in a solid support and containing a pyrotechnic charge, called the main charge, said main chamber being hermetically sealed and bounded, on the one hand, by solid walls of the support and, on the other hand, by a deformable membrane, so that the gases emitted by the combustion of the main pyrotechnic charge cause the volume of said main chamber to increase by deforming said membrane, while leaving the solid walls of the main chamber intact, characterized in that said microactuator includes means for evacuating the gases from the main chamber.
Dependencies are inferred from the claim text.