Method of fabricating an inkjet head

A method for fabricating an inkjet head comprising a plurality of piezoelectric elements, each having a first electrode layer, a piezoelectric layer, a second electrode layer and an oscillation layer, for pressurizing ink contained in a plurality of ink chambers to discharge the ink to a recording medium from a plurality of nozzles communicated with the respective ink chambers, the method characterized by comprising the steps of:

• sequentially forming the first electrode layer, the piezoelectric layer, the second electrode layer and the oscillation layer over one surface of a substrate;
• forming, on the oscillation layer, an ink chamber partition for separating the plurality of ink chambers from each other;
• forming, on the ink chamber partition, a nozzle plate provided with the plurality of nozzles, thereby defining the plurality of ink chambers;
• after the ink chamber partition forming step, mechanically grinding away a part of the substrate from a surface thereof opposite to the first electrode layer;
• after the grinding away step, etching away a remnant substrate;
• and
• after the etching away step, patterning at least the first electrode layer so that a position of the first electrode layer corresponds to that of an associated one of the ink chambers, thereby forming the plurality of piezoelectric elements.