Method and system for handling substrates in a production line including a cluster tool and a metrology tool

A method of operating a cluster tool in a production line, the cluster tool including a plurality of substantially identical process modules, the method comprising:

• receiving a plurality of workpieces;
• processing the workpieces with at least some of the plurality of process modules such that a throughput of the cluster tool is optimized;
• storing process information indicating for each of the workpieces the corresponding process module in which each of the workpieces has been processed;
• and
• receiving measurement data from workpieces selected for measurement on the basis of said process information, wherein said measurement data is used to output a statistical process control chart for each process module.

A system for processing workpieces in a production line, comprising:

• a cluster tool including a plurality of process modules;
• a metrology tool;
• and
• a control unit in communication with said cluster tool and said metrology tool, the control unit being configured to receive, store and provide process information indicating for each workpiece the process module that has been used for processing each workpiece, wherein said control unit is further configured to select some of the workpieces for measurement in said metrology tool on the basis of a process recipe and said process information to optimize a throughput of at least one of the cluster tool and the metrology tool.