US 7,130,020 B2 · Roll printer with decomposed raster scan and X-Y distortion correction

Abstract

A photolithographic machine is described for transferring fine patterns from a photomask to a flexible roll-to-roll format. It is capable of printing multiple layers in exact registry onto a distorted format. It contains 1 to 1 reflective optics, dynamic distortion and magnification correction. The optical transfer assembly scans reciprocally across the format and back and the photomask/platen assembly moves incrementally forward between scans to complete a raster pattern. Both the object and image fields are autofocussed. The optical transfer assembly is retained into a straight-line scanning path by opposed air bearings retained on a straight guide. The photomask/platen assembly is retained into an orthogonal path by air/vacuum bearings operating on a vertical stone face. Together this arrangement substantially prevents yaw scanning errors. The web is fed through the machine from roll to roll without twisting. It remains stationary during each recording pass.

Claims21

Dependent claims

An optical machine for creating an image of a master object on a format plane, including:

a first assembly defining a master object plane and a format plane in spaced apart positions;
a second optical transfer assembly disposed between the master object plane and the format plane, for transferring successive parts of the image of the master object from the plane of the master object to the format plane;
a third assembly coupled to move the second assembly reciprocally linearly along a first direction between the master object and format plane to provide a first dimension of an areal scan pattern;
a fourth assembly coupled to the first and second assemblies for moving the first assembly incrementally in a second direction orthogonal to the first direction between movements of the second assembly to provide a second demension of the areal scan pattern.

1 more element

An optical machine for creating an image of a master object on a format plane, including:

a first assembly defining a master object plane as a first component and a format plane as a second component, the two components being substantially coplanar and in spaced apart positions;
a second assembly comprising an optical transfer subsystem disposed and moveable between the object plane and the format plane, for sequentially transferring successive parts of the image of the master object from the plane of the master object to the format plane;
a third assembly comprising a drive mechanism which moves the second assembly reciprocally in a first linear direction to provide a first dimension of a raster scan pattern;
a fourth assembly comprising a drive mechanism coupled to the first and second assemblies for moving the first assembly incrementally in a second direction orthogonal to the first direction between reciprocations of the second assembly to provide a second dimension of the raster scan pattern;
a fifth assembly comprising a source of actinic radiation, light mixing means and drive means, part of which moves, coupled with the second assembly, to provide actinic radiation to the part of the image of the master object being transferred;
and
a base structure supporting the five assemblies and providing flat and orthogonal reference surfaces for the movements of the first and second assemblies.

4 more elements

Dependencies are inferred from the claim text.

Roll printer with decomposed raster scan and X-Y distortion correction

Life of this patent

Roll printer with decomposed raster scan and X-Y distortion correction

Life of this patent

Abstract

Claims21