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US 7,127,694 B2Granted
Computer implemented design system, a computer implemented design method, a reticle set, and an integrated circuit
AssigneeKabushiki Kaisha Toshiba
InventorsAtsushi Watanabe, Mutsunori Igarashi
Life of this patent
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Abstract
A reticle set includes a first reticle including a first wiring pattern having a first termination pattern; a second reticle including a plurality of via patterns; and a third reticle including a second wiring pattern having a second termination pattern and a second line pattern connected to an end of the second termination pattern.
Claims4
A reticle set comprising:
- a first reticle including a first wiring pattern having a strip-shaped first termination pattern;
- a second reticle including a plurality of via patterns so as to overlap with the first termination pattern;
- and
- a third retiele including a second wiring pattern having a strip-shaped second termination pattern and a second line pattern connected to an end of the second termination pattern, the second termination pattern being extended in the same direction as the first termination pattern so as to overlap with the first termination pattern, and the second line pattern extends diagonal to die direction the second termination pattern extends.
1 more element
Dependencies are inferred from the claim text.