Render-resolve method of obtaining configurations and formatting it for use by semiconductor equipment interfaces
AssigneeAdvanced Micro Devices, Inc.
InventorsRussell Clinton Brown, Thomas P. Jackson, Ronald Ivan Savage, II, Achim Felber
Life of this patent
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Abstract
A method for managing recipes in a semiconductor manufacturing process which includes resolving a recipe to provide a resolved recipe using a configuration for a current context and rendering the recipe to provide a rendered recipe. The rendered recipe corresponds to a format suitable for consumption by an equipment interface of the semiconductor manufacturing process.
Claims24
A computer implemented method for managing recipes in a semiconductor manufacturing process comprising:
- resolving a recipe to provide a resolved recipe using a configuration for a current context, the resolving including using an original element, a resolved root and the current context to resolve the recipe;
- rendering the recipe to provide a rendered recipe, the rendered recipe corresponding to a format suitable for consumption by an equipment interface of the semiconductor manufacturing process.
An apparatus for managing recipes in a semiconductor manufacturing process comprising:
- means for resolving a recipe to provide a resolved recipe using a configuration for a current context, the means for resolving using an original element, a resolved root and the current context to resolve the recipe, the means for resolving being stored on computer readable media;
- and,
- means for rendering the recipe to provide a rendered recipe, the rendered recipe corresponding to a format suitable for consumption by an equipment interface of the semiconductor manufacturing process, the means for rendering being stored on computer readable media.
A system for managing recipes in a semiconductor manufacturing process comprising:
- a resolving module stored on computer readable media, the resolving module resolving a recipe to provide a resolved recipe using a configuration for a current context, the resolving module using an original element, a resolved root and the current context to resolve the recipe;
- and,
- a rendering module stored on computer readable media, the rendering module rendering the recipe to provide a rendered recipe, the rendered recipe corresponding to a format suitable for consumption by an equipment interface of the semiconductor manufacturing process.
Dependencies are inferred from the claim text.