Method and system for estimating manufacturing target bias

A machine-readable storage medium storing a computer program providing a method for estimating manufacturing target bias of products in manufacturing tools, the method comprising the steps of:

• establishing a first data set according to manufacturing target bias history for the products based on a correlation with tools used, wherein the manufacturing tools comprise a first manufacturing tool and other manufacturing tools based on like manufacturing conditions;
• executing a testing operation for a predicted product in the first manufacturing tool to obtain a first predicted manufacturing target bias;
• and
• calculating manufacturing target bias of the predicted product in the other manufacturing tools according to the first data set and the first predicted manufacturing target bias, further comprising:
• initializing manufacturing target bias of the predicted product in the other manufacturing tools according to the first predicted manufacturing target bias;
• obtaining a second data set according to the first data set, the first predicted manufacturing target bias, and the initialized manufacturing target bias;
• and
• calculating the manufacturing target bias of the predicted product in the other manufacturing tools according to the second data set.

A system for estimating manufacturing target bias for products in manufacturing tools, comprising:

• a first data set module, establishing a first data set according to manufacturing target bias history for the products based on a correlation with tools used, wherein the manufacturing tools comprise a first manufacturing tool and other manufacturing tools based on like manufacturing conditions;
• a testing operation module, coupled to the first data set module, executing a testing operation for a predicted product in the first manufacturing tool to obtain a first predicted manufacturing target bias;
• a manufacturing target bias calculation module, coupled to the testing operation module, calculating manufacturing target bias of the predicted product in the other manufacturing tools according to the first data set and the first predicted manufacturing target bias;
• an initialization module, initializing manufacturing target bias of the predicted product in the other manufacturing tools according to the first predicted manufacturing target bias;
• a second data set obtaining module, coupled to the initialization module, obtaining a second data set according to the first data set, the first predicted manufacturing target bias, and the initialized manufacturing target bias;
• and
• a predicted manufacturing target bias calculation module, coupled to the second data set obtaining module, calculating the manufacturing target bias of the predicted product in the other manufacturing tools according to the second data set.