Back to results
US 7,126,745 B2Granted
Method of irradiating ultraviolet light onto an object
AssigneeNikon Corporation
InventorsTomoko Ohtsuki, Soichi Owa
Life of this patent
Estimating the term…
Abstract
A method of irradiating ultraviolet light onto an object. The method includes generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion, amplifying the pulse light plural times with an optical amplifier that includes a plurality of fiber optical amplifiers, wavelength-converting the amplified pulse light into ultraviolet light with a wavelength converting portion that includes a plurality of non-linear optical crystals, and irradiating the ultraviolet light onto the object through an optical system.
Claims44
A method of irradiating ultraviolet light onto an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the object through an optical system.
2 more elements
A method of irradiating ultraviolet light onto an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the object through an optical system,
- wherein an emission property of said ultraviolet light is adjusted by at least one of said laser generating portion and said optical, and
- wherein said emission property is adjusted based on information obtained by detecting at least one of said ultraviolet light of which a wavelength is different from that of said ultraviolet light.
4 more elements
A method of irradiating ultraviolet light onto an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the object through an optical system,
- wherein at least a portion of said optical amplifier is exchanged as a unit.
3 more elements
A method of irradiating ultraviolet light onto an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the object through an optical system,
- wherein a temperature of at least of said plurality of non-linear optical crystals is controlled in said wavelength converting portion.
3 more elements
A method of irradiating ultraviolet light onto an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the object through an optical system,
- wherein at least one of said plurality of non-linear optical crystals is used for NCPM (Non-Critical Phase Matching).
3 more elements
A method of irradiating ultraviolet light onto an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the object through an optical system,
- wherein a phase alignment angle of at least one of said plurality of non-linear optical crystals is adjusted in said wavelength converting portion.
3 more elements
A method of irradiating ultraviolet light onto an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the object through an optical system,
- wherein an expansion of the wavelength width of light between a single wavelength oscillating laser of said laser generating portion and said wavelength converting portion is suppressed.
3 more elements
A method of detecting a pattern of an object, comprising;
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers:
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the pattern through an optical system.
2 more elements
A method of detecting a pattern of an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the pattern through an optical system,
- wherein an emission property of said ultraviolet light is adjusted by at least one of said laser generating portion and said optical, and
- wherein said emission property is adjusted based on information obtained by detecting at least one of said ultraviolet light and light of which a wavelength id different from that of said ultraviolet light.
4 more elements
A method of detecting a pattern of an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the pattern through an optical system,
- wherein at least a portion and said optical amplifier is exchanged as a unit.
3 more elements
A method of detecting a pattern of an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the pattern through an optical system,
- wherein a temperature of at least one of said plurality of non-linear optical crystals is controlled in said wavelength converting portion.
3 more elements
A method of detecting a pattern of an object, comprising:
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the pattern through an optical system,
- wherein at least one of said plurality of non-linear optical crystals is used for NCPM (Non-Critical Phase Matching).
3 more elements
A method of detecting a pattern of an object, comprising;
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the pattern through an optical system,
- wherein a phase alignment angle of at least one of said plurality of non-linear optical crystals is adjusted in said wavelength converting portion.
3 more elements
A method of detecting a pattern of an object, comprising;
- generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion;
- amplifying the pulse light in plural times by means of an optical amplifier that includes a plurality of fiber optical amplifiers;
- wavelength-converting the amplified pulse light into ultraviolet light by means of a wavelength converting portion that includes a plurality of non-linear optical crystals;
- and
- irradiating the ultraviolet light onto the object through an optical system,
- wherein an expansion of the wavelength width of light between a single wavelength oscillating laser of said laser generating portion and said wavelength converting portion is suppressed.
3 more elements
Dependencies are inferred from the claim text.