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US 7,126,741 B2Granted
Light modulator assembly
AssigneeHewlett-Packard Development Company, L.P.
InventorsWilliam R. Wagner, Winthrop D. Childers
Life of this patent
Estimating the term…
Abstract
A light modulator assembly includes a substrate, a micro-electro mechanical semiconductor device (MEMS device) formed on the substrate, and a temperature control device coupled to the substrate and configured to maintain the MEMS device at or above an elevated threshold temperature.
Claims49
A light modulator assembly, comprising:
- a micro-electro mechanical semiconductor device (MEMS device) formed an a substrate;
- a light engine for illuminating said MEMS device;
- and
- a temperature control device thermally coupled to said substrate and configured to heat said MEMS device during operation of said MEMS device and to maintain said MEMS device at or above an elevated threshold temperature, said temperature control device being separate from said light engine.
1 more element
A light modulator assembly, comprising:
- a substrate;
- a micro-electro mechanical semiconductor device (MEMS device) formed on said substrate;
- and
- a temperature control device coupled to said substrate and configured to both selectively heat or cool said MEMS device during operation of said MEMS device to maintain said operating MEMS device above an elevated threshold temperature and below an upper threshold temperature.
1 more element
A light modulator assembly, comprising:
- a substrate;
- a micro-electro mechanical semiconductor device (MEMS device) formed on said substrate;
- and
- a temperature control device coupled to said substrate and configured to both selectively heat or cool said MEMS device to maintain said MEMS device within a predetermined, elevated temperature range.
1 more element
A method of forming a light modulator assembly, comprising:
- forming a plurality of micro-electromechanical system (MEMS) devices configured to operate within an elevated temperature range;
- coupling at least one temperature control device to at least one of said MEMS devices, wherein said temperature control device is configured to both selectively heat or coal said MEMS device to maintain said MEMS device within said elevated temperature range.
A light modulator assembly, comprising:
- means for modulating light;
- means for illuminating said means for modulating light;
- and
- means, thermally coupled to said means for modulating light, for heating said means for modulating light and maintaining said means for modulating light above an elevated threshold temperature during operation of said means for modulating light, wherein said means for heating are separate from said means for illuminating.
1 more element
Dependencies are inferred from the claim text.