Systems and methods for multi-dimensional metrology and/or inspection of a specimen

A method for determining a dimension of a structure on a specimen, comprising:

• scanning the specimen with partial oblique illumination such that the structure passes across an oblique plane separating an illuminated region and a non-illuminated region in the partial oblique illumination to form an image of the structure;
• integrating an intensity of the image;
• and
• determining a height of the structure from the integrated intensity.

A system configured to determine a dimension of a structure on a specimen, comprising:

• a first imaging system configured to form an image of the structure by scanning the specimen with partial oblique illumination such that the structure passes across an oblique plane separating an illuminated region and a non-illuminated region in the partial oblique illumination;
• a second imaging system configured to form a bright field image of the specimen by scanning the specimen with bright field illumination;
• and
• a processor coupled to the first and second imaging systems, wherein the processor or the first imaging system is configured to integrate an intensity of the image, and wherein the processor is further configured to determine a height of the structure from the integrated intensity, to detect defects on the specimen from the bright field image, and to determine a lateral dimension of the structure from the bright field image.

A method for determining a dimension of a structure on a specimen, comprising:

• scanning the specimen with partial oblique illumination such that the structure passes across an oblique plane separating an illuminated region and a non-illuminated region in the partial oblique illumination to form an image of the structure;
• integrating an intensity of the image;
• scanning the specimen with bright field illumination to form a bright field image of the specimen;
• detecting defects on the specimen from the image or the bright field image;
• and
• determining a height of the structure from the integrated intensity and a lateral dimension of the structure from the bright field image.