Device for holding measurement instruments
AssigneeCarl Zeiss SMT GmbH
InventorsGuenter Maul, Norbert Hubig
Life of this patent
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Abstract
A device for holding measurement instruments (2), in particular interferometers, is formed from a plurality of structure elements (4, 5, 6, 7) connected to one another and made from at least one material. The at least one material has a very low coefficient of thermal expansion α. The structure elements (4) on which the measurement instruments (2) are arranged are secured between at least two structure side parts (5) in such a way that the thermal expansions of the structure side parts (5) and of the connections (3) have no effect in the measurement direction of the measurement instruments (2).
Claims20
A device for holding measurement instruments formed from a plurality of structure elements connected to one another and made from at least one material, the at least one material having a very low coefficient of thermal expansion α, wherein the structure elements on which the measurement instruments are arranged are secured between at least two structure side parts in such a way that the thermal expansions of the structure side parts and of the connections have no effect in the measurement direction of the measurement instruments.
A connecting device having a coefficient of thermal expansion α which deviates from a coefficient of thermal expansion α of two structure elements which are to be connected without stresses, each of the structure elements being gripped by means of at least a pair of connecting elements which are formed symmetrically with respect to the structure element and the pair of connecting elements being connected to one another via securing means.
A device for holding interferometers, formed from a plurality of structure elements connected to one another and made from at least one material, the at least one material having a very low coefficient of thermal expansion α, wherein the structure elements on which the interferometers are arranged are secured between at least two structure side parts in such a way that the thermal expansions of the structure side parts and of the connections have no effect in the measurement direction of the interferometers.
Dependencies are inferred from the claim text.