Spectral image measurement apparatus and method using the same

A spectral image measurement apparatus comprising:

• a spectral element array which includes:
• a substrate;
• and
• a plurality of micro-electrically-driven mechanical spectral elements arranged two-dimensionally on the substrate,
• wherein each of the spectral elements comprises a diffraction grating having a diffraction surface, the diffraction grating being pivotably supported on the substrate;
• wherein each of the spectral elements generates spectra from a light entering the diffraction surface by applying an electric field to the diffraction grating to tilt the diffraction grating with respect to the substrate;
• and
• wherein each of tilt angles of the diffraction gratings with respect to the substrate is capable of being set individually;
• a spectral element drive section for driving the spectral elements;
• an inlet-side optical system for guiding, to the spectral element array, a light emitted from an object to be detected;
• a detection-side optical system for forming an image with a diffracted light output from the spectral element array;
• and
• an array sensor for detecting the diffracted light through the detection-side optical system.