Test apparatus, test method, electronic device, and electronic device manufacturing method

Abstract

A test apparatus for testing an electronic device provided with a field effect transistor, which operates in response to a given test pattern, is provided, wherein the test apparatus includes a power supply for providing electric power which drives the electronic device, a pattern generating unit for generating a plurality of test patterns sequentially and providing the electronic device with the test patterns, a leak current detecting unit for detecting a leak current of the field effect transistor, a voltage control unit for controlling a substrate voltage applied to a substrate on which the field effect transistor is provided, in order to maintain the leak current detected by the leak current detecting unit at a predetermined value, and a power supply current measuring unit for measuring a power supply current input to the electronic device at every time when each of the test patterns is applied and deciding acceptability of the electronic device on the basis of the measured power supply currents.

Dependencies are inferred from the claim text.