Electrostatic capacitance detection device
AssigneeSeiko Epson Corporation
InventorMitsutoshi Miyasaka
Life of this patent
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Abstract
Aspects of the invention can provide an electrostatic capacitance detection device having M number of row lines and N number of column lines arranged in a matrix of M rows and N columns, and an electrostatic capacitance detection element formed at the intersection thereof. The electrostatic capacitance detection element can include a signal detection element, a signal amplifying element and a column selection element and a row selection element. The signal detection element can include a capacitance detecting electrode, a capacitance detecting dielectric layer, and a reference capacitor. One of a pair of electrodes in the reference capacitor is coupled to the row line. Accordingly, the invention can achieve a superior electrostatic capacitance detection device.
Claims21
An electrostatic capacitance detection device that reads surface contours of a target object by detecting electrostatic capacitance, which changes according to a distance from the target object, comprising:
- output lines;
- power supply lines;
- M number of row lines, and N number of column lines that are arranged in a matrix of M rows and N columns;
- and
- an electrostatic capacitance detection element that is formed at intersections between the row lines and column lines;
- the electrostatic capacitance detection element including a signal detection element, a signal amplifying element, a column selection element and a row selection element;
- the signal detection element including a capacitance detecting electrode, a capacitance detecting dielectric layer and a reference capacitor;
- the reference capacitor including a reference capacitor first electrode, a reference capacitor dielectric layer and a reference capacitor second electrode;
- the signal amplifying element, the column selection element and the row selection element being coupled in series and located between an output line and a power supply line;
- and
- the reference capacitor first electrode being electrically coupled to one of the row lines.
Dependencies are inferred from the claim text.