Piezoelectric/electrostrictive film-type device
AssigneeNGK Insulators, Ltd.
InventorsHirofumi Yamaguchi, Takatoshi Nehagi, Kunihiko Yoshioka
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Abstract
A piezoelectric/electrostrictive film-type device is provided which includes a ceramic substrate having a thin diaphragm portion and a peripheral thick portion, a lower electrode, an auxiliary electrode, a piezoelectric/electrostrictive film, and an upper electrode. The lower electrode, the auxiliary electrode, the piezoelectric/electrostrictive film, and the upper electrode are layered in that order on the ceramic substrate. The upper electrode has a length of 30 to 70% relative to the length of the thin diaphragm portion, and preferably has a width of 70% or more relative to the width of the thin diaphragm portion.
Claims2
A piezoelectric/electrostrictive film-type device, comprising:
- a ceramic substrate having a thin diaphragm portion and a peripheral thick portion, a lower electrode, an auxiliary electrode, a piezoelectric/electrostrictive film, and an upper electrode;
- the lower electrode, the auxiliary electrode, the piezoelectric/electrostrictive film, and the upper electrode being layered on the substrate in that order,
- wherein a length of the upper electrode is 30 to 70% of a length of the thin diaphragm portion.
Dependencies are inferred from the claim text.