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US 7,126,207 B2Granted
Capacitor with carbon nanotubes
AssigneeIntel Corporation
InventorsLarry E. Mosley, Quat T. Vu, Yuegang Zhang
Life of this patent
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Abstract
In one embodiment, a capacitor comprises a substrate defining a first electrical terminal; a catalyst layer disposed on the substrate; a plurality of carbon nanotubes disposed on the catalyst layer; a dielectric layer disposed over the plurality of carbon nanotubes; and a conductive layer disposed on the dielectric layer and defining a second electrical terminal.
Claims15
A capacitor, comprising:
- a substrate defining a first electrical terminal;
- a catalyst layer disposed on the substrate;
- a plurality of carbon nanotubes disposed on the catalyst layer and electrically coupled through the catalyst layer to the substrate;
- a dielectric layer disposed over the plurality of carbon nanotubes;
- and
- a conductive layer disposed on the dielectric layer and defining a second electrical terminal.
3 more elements
A capacitor, comprising:
- a substrate defining a first electrical terminal;
- a catalyst layer disposed on the substrate;
- a plurality of carbon nanotubes disposed on the catalyst layer;
- a dielectric layer disposed over the plurality of carbon nanotubes;
- a conductive layer disposed on the dielectric layer and defining a second electrical terminal;
- a plurality of power contacts electrically coupled by a plurality of first vias to a selected one of the catalyst layer and the conductive layer;
- and a plurality of ground contacts electrically coupled by a plurality of second vias to the other one of the catalyst layer and the conductive layer.
4 more elements
Dependencies are inferred from the claim text.