Semiconductor device having a capacitance device
AssigneeSeiko Epson Corporation
InventorMasahiro Kanai
Life of this patent
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Abstract
A semiconductor device having an isolation region formed in a semiconductor substrate and a capacitance device formed above that isolation region. The capacitance device has a first capacitor conductive layer disposed above the isolation region and a second capacitor conductive layer in the shape of a side wall formed along one side surface of the first capacitor conductive layer. The second capacitor conductive layer is disposed facing the first capacitor conductive layer, with a first capacitor insulating layer interposed.
Claims20
A semiconductor device comprising an isolation region formed in a semiconductor layer, a capacitance device formed above the isolation region, and a first contact section connected to the capacitance device,
- the capacitance device including:
- a first capacitor conductive layer disposed above the isolation region, and
- a second capacitor conductive layer formed along one side surface of the first capacitor conductive layer,
- the second capacitor conductive layer being disposed facing the first capacitor conductive layer, with a first capacitor insulating layer interposed;
- the first contact section including a first contact conductive layer;
- the first contact conductive layer having a depression, and an insulating layer being embedded within the depression.
A semiconductor device comprising an isolation region formed in a semiconductor layer, a capacitance device formed above the isolation region, and a second contact section connected to the capacitance device;
- the capacitance device including:
- a first capacitor conductive layer disposed above the isolation region, and
- a second capacitor conductive layer formed along one side surface of the first capacitor conductive layer,
- the second capacitor conductive layer being disposed facing the first capacitor conductive layer, with a first capacitor insulating layer interposed;
- the second contact section including a fourth contact conductive layer and a fifth contact conductive layer;
- the fourth contact conductive layer being connected to the first capacitor conductive layer;
- and
- the fifth contact conductive layer being connected to the second capacitor conductive layer.
A semiconductor device comprising an isolation region formed in a semiconductor layer, a capacitance device formed above the isolation region, a first contact section connected to the capacitance device, and a second contact section connected to the capacitance device,
- the capacitance device including:
- a first capacitor conductive layer disposed above the isolation region, and
- a second capacitor conductive layer formed along one side surface of the first capacitor conductive layer,
- the second capacitor conductive layer being disposed facing the first capacitor conductive layer, with a first capacitor insulating layer interposed;
- the first contact section including a first contact conductive layer and a pad-shaped second contact conductive layer disposed above the first contact conductive layer;
- the second contact section including a fourth contact conductive layer and a fifth contact conductive layer;
- the fourth contact conductive layer being connected to the first capacitor conductive layer;
- and
- the fifth contact conductive layer being connected to the second capacitor conductive layer.
A semiconductor device comprising an isolation region formed in a semiconductor layer and a capacitance device formed above the isolation region,
- the capacitance device including:
- a first capacitor conductive layer disposed above the isolation region,
- a second capacitor conductive layer formed along one side surface of the first capacitor conductive layer,
- the second capacitor conductive layer being disposed facing the first capacitor conductive layer, with a first capacitor insulating layer interposed;
- a contact region formed of a doped layer being further provided in the semiconductor layer, and
- the contact region being disposed around the isolation region.
A semiconductor device comprising an isolation region formed in a semiconductor layer and a capacitance device formed above the isolation region,
- the capacitance device including:
- a first capacitor conductive layer disposed above the isolation region,
- a second capacitor conductive layer formed along one side surface of the first capacitor conductive layer,
- the second capacitor conductive layer being disposed facing the first capacitor conductive layer, with a first capacitor insulating layer interposed;
- the semiconductor device further comprising a memory cell array in which non-volatile memory cells are arranged in a matrix of rows and columns,
- each of the non-volatile memory cells including:
- a word gate provided above the semiconductor layer with a first gate insulating layer interposed;
- an impurity layer formed in the semiconductor layer, to configure a source region or drain region;
- and
- first and second control gates provided along one side surface and another side surface of the word gate, respectively;
- the first control gate being disposed facing the semiconductor layer with a second gate insulating layer interposed, and also facing the word gate with a second side insulating layer interposed;
- and
- the second control gate being disposed facing the semiconductor layer with the second gate insulating layer interposed, and also facing the word gate with the second side insulating layer interposed.
Dependencies are inferred from the claim text.