Device and method of positionally accurate implantation of individual particles in a substrate surface
AssigneeThe Regents of the University of California
InventorsThomas Schenkel, Ivo W. Rangelow, Jan Meijer
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Abstract
A device and a method for positionally accurate implantation of individual particles in a substrate surface (1a) are described. A diaphragm for a particle beam to be directed onto the substrate surface (1a) and a detector provided thereon in the form of a p-n junction for determining a secondary electron flow produced upon impact of a particle onto the substrate surface (1a) are provided on a tip (4) which is formed on a free end portion of a flexible arm (2) to be mounted on one side. The device is part of a scanning device operating according to the AFM method.
Claims27
Device for positionally accurate implantation of individual particles in a substrate surface (1a) with a component which has a diaphragm for a particle beam to be directed towards the substrate surface (1a) and a detector provided thereon or nearby for detecting a secondary electron flow produced upon impact of a particle onto the substrate surface, characterized in that the component is a flexible arm (2), which is to be mounted on one side, with a free end portion (2b), having an upper side (2d) and underside (2c), which, on its underside (2c), has a tip (4) forming the diaphragm and provided with the detector.
Method for exact implantation of individual particles in a substrate surface (1a), the particles being directed through a diaphragm towards the substrate surface (1a) for implantation of particles in said surface, secondary electron flows produced as a result being measured and electrical signals produced by the secondary electrons being used as proof of the implantation of the particles, characterized in that a tip (4) of a flexible arm (2b) provided with a hole (5) is used as diaphragm, by means of which scanning of the substrate surface (1a) with the tip (4) and storing the obtained surface data is undertaken before implantation, and in that the tip (4) is positioned during implantation applying the data obtained during the scanning.
Method for exact implantation of individual particles in a substrate surface (1a), the particles being directed through a diaphragm towards the substrate surface (1a), characterized in that a tip (4) of a flexible arm (2b) provided with a hole (5) is used as diaphragm, by means of which scanning of the substrate surface (1a) with the tip (4) and storing the obtained surface data is undertaken before implantation, and in that the tip (4) is positioned during implantation applying the data obtained during the scanning.
A method for exact implantation of individual particles in a substrate surface (1a), comprising the steps of:
- (a) providing a substrate surface (1a) and a device comprising a component having a diaphragm for a particle beam to be directed towards the substrate surface (1a) and a detector provided thereon or nearby for detecting a secondary electron flow produced upon impact of a particle onto the substrate surface, characterized in that the component is a flexible arm (2), which is to be mounted on one side, with a free end portion (2b), having an upper side (2d) and underside (2c), which, on its underside (2c), has a tip (4) forming the diaphragm and provided with the detector, wherein the tip (4) is provided with a hole (5), and further comprising storage for image and position date;
- (b) scanning of the substrate surface (1a) with the tip (4);
- (c) storing in said storage the image and position data of the surface obtained by scanning the surface with said tip;
- (d) positioning said tip at a specific position over said surface;
- (e) directing particles through the diaphragm towards the substrate surface (1a), whereby implantation of said particles occurs at said specific position in said surface;
- (f) measuring secondary electron flows produced and electrical signals produced by the secondary electrons as proof of the implantation of the particles.
Dependencies are inferred from the claim text.