System and method for sensing using adjustable modulation transfer function (MTF)
AssigneeKLA-Tencor Technologies Corporation
InventorsYung-Ho Chuang, J. Joseph Armstrong, David Lee Brown, Bin-Ming Benjamin Tsai
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Abstract
A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as aliasing and maintaining contrast.
Claims26
A sensor comprising:
- a pixel having a modulated transfer function (MTF) associated therewith;
- and
- a variable gate voltage element connected to the pixel and configured to change the pixel MTF.
A method for sensing an image of a specimen, comprising:
- receiving light energy from the specimen and applying the light energy to a sensor comprising at least one pixel;
- and
- applying a variable gate voltage to each pixel, wherein applying the variable gate voltage to each pixel adjusts a modulated transfer function (MTF) of the pixel.
A system for inspecting a specimen comprising a sensor, the system comprising:
- at least one pixel within the sensor formed from a substrate and comprising a depletion region and a non depleted depth;
- an insulator formed above the substrate;
- a conductor formed above the insulator;
- and
- a variable gate voltage source connected to the conductor and the substrate;
- wherein the variable gate voltage source applies a variable voltage to change the modulated transfer function (MTF) of the pixel.
Dependencies are inferred from the claim text.