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AssigneeNGK Insulators, Ltd.
InventorsShinji Yamaguchi, Kazuhiro Nobori
Estimating the term…
A ceramic heater is provided including a ceramic sintered body and a heat resistor embedded in the substrate, wherein a change in the temperature uniformity on the heating face is reduced. The heat resistor contains a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table and a carbide of the metal. A ratio (Ic/Im) of a total strength (Ic) of main peak of the metal carbide to a total strength (Im) of main peak strength of the metal is not larger than 0.2. Alternatively, the ratio (Rb−Ra)/Ra is not larger than 30 percent, where “Ra” is the resistance of the heat resistor before sintering and “Rb” is the resistance of the heat resistor after sintering.
A ceramic heater comprising a ceramic sintered body and a heat resistor in contact with said sintered body;
A method of producing a ceramic heater comprising a ceramic sintered body and a heat resistor in contact with said sintered body, said method comprising the steps of:
A method of producing a ceramic heater comprising sing a ceramic sintered body and a heat resistor in contact with said sintered body, said method comprising the steps of:
An article comprising a ceramic sintered body and a metal member in contact with said sintered body:
A method of producing a ceramic heater comprising a ceramic sintered body and a heat resistor in contact with said sintered body, said method comprising the steps of:
A method of producing a ceramic heater comprising a ceramic sintered body and a heat resistor in contact with said sintered body, said method comprising the steps of:
Dependencies are inferred from the claim text.
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From the US filing history. Foreign family members aren’t listed.
Apparatus for thermal treatment: mainly by conduction
Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor: characterised by the…
Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds: applied to semiconductors, e.g.…
Resistor making: heater type
Term ended 30 Mar 2023 (estimated)
This application claims the benefits of Japanese Patent Application P2002-88585 filed on Mar. 27, 2002, the entirety of which is incorporated by reference.
1. Field of the Invention
The invention relates to a ceramic heater, a method of producing the same and an article having a metal member.
FIG. 1 is a cross sectional view schematically showing a heating system 1 having a ceramic heater 2 according to one embodiment of the present invention.
FIG. 2 is a cross sectional view schematically showing an assembly 10 for producing the ceramic heater of FIG. 1.
FIG. 3 is an X-ray diffraction chart of a heat resistor in an sample of an example 6.
One or more metal element selected from the group consisting of VIa, Va and VIa groups of the Periodic Table may preferably be the followings.
W, Mo, Hf, Nb, Ta
Ic/Im may preferably be not larger than 0.1 on the viewpoint of uniformity of temperature on the heating face.