Method of manufacturing an array substrate for a liquid crystal display device

A method of manufacturing an array substrate for a liquid crystal display device, comprising:

• forming a gate line and a gate electrode on a substrate;
• forming a gate insulating layer on the substrate;
• forming an active layer and an ohmic contact layer on the gate insulating layer;
• forming a data line, a source electrode and a drain electrode on the substrate;
• forming a passivation layer by forming an insulating material on the substrate;
• forming a drain contact hole by patterning the passivation layer, the drain contact hole exposing a part of the drain electrode;
• forming a transparent metal layer on the passivation layer;
• forming a photo-resist layer on the transparent metal layer;
• performing a light exposure by disposing a mask over the photo-resist layer, the mask including a light blocking portion, a slit portion having at least two slits and a light transmission portion;
• and
• forming a pixel electrode by developing the photo-resist layer exposed to light and etching the exposed transparent metal layer.

A manufacturing method of a thin film transistor array substrate for a display device, comprising:

• forming a plurality of gate lines and a plurality of gate electrodes on a substrate by depositing and etching a first conductive layer;
• forming a gate insulating layer on the substrate to cover the plurality of gate lines and the plurality of gate electrodes;
• forming a plurality of island-shaped active layers and a plurality of island-shaped ohmic contact layers on the gate insulating layer;
• forming a plurality of data lines, a plurality of source electrodes and a plurality of drain electrodes on the gate insulating layer, on the plurality of active layers and on the plurality of ohmic contact layers by depositing and etching a second conductive layer;
• forming a passivation layer having a plurality of contact holes for exposing at least one of the conductive layers by depositing and etching an insulating material on the gate insulating layer to cover the plurality of data lines, the plurality of source electrodes and the plurality of drain electrodes;
• and
• forming a plurality of pixel electrodes overlapping with the plurality of data lines and having a space less than 3.5 μm between at least two neighboring pixel electrodes on the passivation layer.

A method of manufacturing a thin film transistor array substrate for a display device, comprising:

• forming a plurality of gate lines and a plurality of gate electrodes on a substrate by depositing and etching a first conductive layer;
• forming a gate insulating layer on the substrate to cover the plurality of gate lines and the plurality of gate electrodes;
• forming a plurality of island-shaped active layers and a plurality of island-shaped ohmic contact layers on the gate insulating layer;
• forming a plurality of data lines, a plurality of source electrodes and a plurality of drain electrodes on the gate insulating layer, on the plurality of active layers and on the plurality of ohmic contact layers by depositing and etching a second conductive layer;
• forming a passivation layer having a plurality of contact holes for exposing at least one of the conductive layers by depositing and etching an insulating material on the gate insulating layer to cover the plurality of data lines, the plurality of source electrodes and the plurality of drain electrodes;
• and
• forming a plurality of pixel electrodes overlapping with the plurality of data lines and having a space of less than 3.5 μm between at least two neighboring pixel electrodes on the passivation layer, and the plurality of pixel electrodes is formed to utilize a mask including a light blocking portion, a slit portion having at least two slits and a light transmission portion.