Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same

A semiconductor wafer fabricating method, comprising the steps of:

• setting, to a power supply for supplying a current, a voltage, or power as an output item necessary for processing of a semiconductor wafer, a strength of the output item;
• setting outputting of the output item to “on or off;
• sensing the output item to provide an output sense signal according to a value obtained by sensing the output item;
• and
• assuming occurrence of an abnormality and displaying an abnormality indication in response to an event in which the output sense signal exceeds a predetermined threshold value when the outputting of the output item is “off”.

A semiconductor wafer fabricating method for use with power supply for supplying power indicating a current or a voltage necessary for processing a semiconductor wafer, comprising the steps of:

• setting a strength of the power to a predetermined value;
• setting the supply of the power to “on” or “off”;
• sensing the power presently being supplied to the semiconductor wafer processing and outputting a sense signal according to a value obtained by sensing the present power;
• sensing the power when a power state is set “off” determining occurrence of an abnormality when the sense signal according to a value obtained by sensing the power exceeds a predetermined value, and generating an abnormality occurrence signal indicating occurrence of the abnormality;
• and
• inhibiting, in response to the abnormality occurrence signal, the processing for a subsequent semiconductor wafer to be processed.