Process for producing monomer
AssigneeMitsubishi Rayon Co., Ltd.
InventorsEiji Satou, Makoto Kaneko, Naoshi Murata
Life of this patent
Estimating the term…
Abstract
A process for producing a monomer for resists represented by the following general formula 1: wherein R1 represents hydrogen or an optionally substituted alkyl group; R2, R3 and R4 each independently represent hydrogen or a substituent; and X, Y and Z each independently represent a direct bond or an optionally substituted alkylene group with 1 to 3 chain members, the process comprising carrying out esterification or transesterification in the presence of a biocatalyst.
Claims21
A process for producing a monomer represented by the following general formula 1,
- wherein R1 represents hydrogen or optionally substituted alkyl;
- R2, R3 and R4 each independently represent hydrogen or a substituent;
- X and Y each independently represent a direct bond or optionally substituted alkylene with 1 to 3 chain members, and Z represents a direct bond or substituted alkylene with 1 chain member, comprising carrying out esterification or transesterification between a compound represented by the following general formula 2:
- wherein R2, R3, R4, X, Y and Z are defined as described above for general formula 1, and
- a compound represented by the following general formula 3:
- wherein R1 is defined as described above for general formula 1 and R5 represents hydrogen or a substituent,
- in the presence of a biocatalyst.
A process for producing a monomer for resists represented by the following general formula 1:
- wherein R1 represents hydrogen or optionally substituted alkyl;
- R2, R3 and R4 each independently represent hydrogen or a substituent;
- and X, Y and Z each independently represent a direct bond or optionally substituted alkylene with 1 to 3 chain members,
- comprising carrying out esterification or transesterification between a compound represented by the following general formula 2:
- wherein R2, R3, R4, X, Y and Z are defined as described above for general formula 1 provided that a compound wherein OH in formula 2 is linked to a primary carbon atom is excluded, and
- a compound represented by the following general formula 3:
- wherein R1 is defined as described above for general formula 1 and R5 represents hydrogen or a substituent,
- in the presence of a biocatalyst.
A process for producing a monomer represented by the following general formula 1,
- wherein R1 represents hydrogen or optionally substituted alkyl;
- R2, R3 and R4 each independently represent hydrogen or a substituent;
- and X, Y and Z each independently represent a direct bond or optionally substituted alkylene with 1 to 3 chain members, comprising carrying out esterification or transesterification between a compound represented by the following general formula 2:
- wherein R2, R3, R4, X, Y and Z are defined as described above for general formula 1, and
- a compound represented by the following general formula 3:
- wherein R1 is defined as described above for general formula 1 and R5 represents hydrogen or a substituent,
- in the presence of a biocatalyst.
Dependencies are inferred from the claim text.