Setter, method for manufacturing ceramic substrate, and ceramic substrate
AssigneeTDK Corporation
InventorSatoshi Sasaki
Life of this patent
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Abstract
A setter and a method for manufacturing a ceramic substrate are capable of suppressing deformation such as warpage occurring in a ceramic substrate after baking. A ceramic green sheet 4 is mounted and baked on a mount surface of a zirconia setter wherein an average particle size is 0.3 μm, a porcelain density is not less than 6 kg/dm 3, a thermal conductivity is not more than 5 W/mK, and an arithmetic average roughness of the mount surface is 1 μm–20 μm, whereby it is feasible to suppress the deformation such as warpage occurring in a piezoelectric ceramic substrate after baked.
Claims2
A setter having a mount surface on which a ceramic green sheet is to be mounted in baking the ceramic green sheet to form a ceramic substrate,
- wherein an average particle size is 0.3 μm–2.5 μm, a porcelain density is not less than 6 kg/dm3, a thermal conductivity is not more than 5 W/mK, and an arithmetic average roughness of the mount surface is 1 μm–20 μm.
A method for manufacturing a ceramic substrate, the method comprising:
- preparing a setter wherein an average particle size is 0.3 μm–2.5 μm, a porcelain density is not less than 6 kg/dm3, a thermal conductivity is not more than 5 W/mK, and an arithmetic average roughness of a mount surface is 1 μm–20 μm;
- and mounting and baking a ceramic green sheet on a mount surface of the setter so as to form the ceramic substrate from the baked green sheet.
Dependencies are inferred from the claim text.