Method for manufacturing nanopowders of oxide through DC plasma thermal reaction
AssigneeIndustrial Technology Research Institute
InventorsShih-Chieh Liao, Song-Wein Hong, Hsiu-Fen Lin
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AssigneeIndustrial Technology Research Institute
InventorsShih-Chieh Liao, Song-Wein Hong, Hsiu-Fen Lin
Estimating the term…
A method for manufacturing powders of oxides in a nanometer level through a direct current plasma thermal reaction is disclosed. The energy required is provided by the plasma that is generated in the non-transferred DC plasma apparatus. Once the solid precursors are introduced into the plasma, the solid precursors are vaporized and oxidized in the plasma reaction region of the non-transferred DC plasma apparatus continuously. Then, the oxide powders in a nanometer scale can form homogeneously and continuously. By controlling the nozzle size, the speed of the plasma can be adjusted and the coarsening and agglomeration of the nanopowders can be effectively prevented. Finally, oxide nanopowders of high-purity and high-dispersity are obtained by cooling down the plasma gas containing the vaporized and oxidized precursor through a vortical cooling-gas.
A method for manufacturing oxide nanopowders, comprising the following steps:
Dependencies are inferred from the claim text.