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US 7,125,510 B2Granted
Microstructure fabrication and microsystem integration
OwnerZhili Huanginventor
Life of this patent
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Abstract
Fabrication of a microstructure device includes assembling a mold component and a mold body to form a device mold for the microstructure device. The microstructure device is cast from the device mold, then the mold component is removed from the microstructure device. The microstructure device is then released from the mold body.
Claims48
A method of fabricating a microstructure device, comprising:
- assembling a mold component and a mold body to form a device mold for the microstructure device, the mold component defining a microstructure of the microstructure device, the mold component comprising a reversible material that changes from a solid form to a liquid form or from a liquid form to a solid form depending on the changes in an environment condition;
- casting the microstructure device from the device mold;
- removing the mold component from the microstructure device by applying a centrifugal force to draw the mold component in liquid form away from the microstructure device;
- and
- releasing the microstructure device from the mold body.
2 more elements
A method of fabricating a microstructure device, comprising:
- assembling a mold component and a mold body to form a device maid for the microstructure device, the mold component defining a microstructure of the microstructure device, the mold component comprising a reversible material that changes from a solid form to a liquid form or from a liquid form to a solid form depending on the changes in an environment condition;
- casting the microstructure device from the device mold;
- removing the mold component from the microstructure device by using a suction force to daw the mold component in liquid form away from the microstructure device;
- and
- releasing the microstructure device from the mold body.
2 more elements
A method of fabricating a microstructure device, comprising:
- assembling a mold component and a mold body to form a device mold for the microstructure device;
- casting the microstructure device from the device mold;
- removing the mold component from the microstructure device;
- and
- releasing the microstructure device from the mold body;
- wherein the mold component comprises a material that changes from a solid form to a gaseous form or from a gaseous form to a solid form depending on changes in one or more environment conditions.
3 more elements
A method of fabricating a microstructure device, comprising;
- fabricating a mold component by using a component mold that has a cavity having a shape that is substantially the same as a shape of the mold component, wherein fabricating the mold component comprises compressing a material in powder form into the cavity to form the mold component;
- assembling the mold component and a mold body to form a device mold for the microstructure device;
- casting the microstructure device from the device mold;
- removing the mold component from the microstructure device;
- and
- releasing the microstructure device from the mold body.
3 more elements
A method, comprising:
- assembling a set of mold components and a mold body to form a device mold for a microstructure device, the set of mold components including a first mold component that does not contact the mold body and is coupled to the mold body by one or more connecting components;
- casting the microstructure device from the device mold;
- and
- removing the set of mold components from the microstructure device, including removing the first mold component to form a chamber in the microstructure device.
1 more element
A method of fabricating a microstructure device, comprising:
- fabricating a device mold by connecting a set of mold components to a mold body and connecting a set of functional components to the mold body, the mold components defining microstructures of the microstructure device, the mold component comprising a reversible material that changes from a solid form to a liquid form or from a liquid form to a solid form depending on the changes in an environment condition;
- casting the microstructure device from the device mold;
- and
- removing the set of mold components from the microstructure device while retaining the functional components in the microstructure device, wherein removing the mold components comprises applying a centrifugal force to draw the mold components in liquid form away from the microstructure device.
1 more element
A method of fabricating a microstructure device, comprising:
- fabricating a device mold by connecting a set of mold components to a mold body and connecting a set of functional components to the mold body, the mold components defining microstructures of the microstructure device, the mold component comprising a reversible material that changes from a solid form to a liquid form or from a liquid form to a solid form depending on the changes in an environment condition;
- casting the microstructure device from the device mold;
- and
- removing the set of mold components from the microstructure device while retaining the functional components in the microstructure device, wherein removing the mold component comprises using a suction force to draw the mold component in liquid form away from the microstructure device.
1 more element
Dependencies are inferred from the claim text.