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US 7,125,326 B2Granted
Apparatus and method for removing a CMP polishing pad from a platen
AssigneeEbara Technologies Incorporated
InventorsCormac Walsh, Jun Liu, Gerard Moloney, A. Ernesto Saldana
Life of this patent
Estimating the term…
Abstract
The invention provides a pad removal apparatus and method that enables improved pad removal from a platen.
Claims15
A method, comprising:
- coupling a CMP pad to a rod;
- rotating the rod to roll up the pad;
- and
- rolling the rod laterally during the rotating, wherein the rotating is caused by a motor, and wherein a universal joint couples to the rod the motor to transfer torque and allow for a range of movement during the rotating.
1 more element
A method, comprising:
- coupling a CMP pad to a rod;
- rotating the rod to roll up the pad;
- rolling the rod laterally during the rotating, wherein the rolling is caused by the rotation of the rod.
A method, comprising:
- coupling a CMP pad to a rod;
- rotating the rod to roll up the pad;
- rolling the rod laterally during the rotating, and
- placing a film over the pad except for an edge before the rotating and rolling.
1 more element
An apparatus, comprising:
- a rod capable of being coupled to a CMP pad;
- a motor coupled to the rod to cause rotation of the rod;
- and
- a universal joint that couples to the rod the motor to transfer torque and allows for a range of movement during the rotation of the rod.
1 more element
An apparatus, comprising:
- a rod capable of being coupled to a CMP pad;
- and
- a motor coupled to the rod to cause rotation of the rod, wherein the rotation of the rod causes rolling of the rod.
An apparatus comprising:
- a rod capable of being coupled to a CMP pad;
- a motor coupled to the rod to cause rotation of the rod;
- a guide block coupled to the motor;
- and
- a guide rail operatively associated with the guide block to guide the movement of the guide block and motor along the guide rail as the rod rotates.
2 more elements
A method comprising:
- coupling a CMP pad to a rod;
- rotating the rod with a motor to remove the CMP pad from a platen;
- and
- using a guide block operatively associated with a guide rail to guide a lateral movement of the rod and motor along the guide rail as the rod rotates.
1 more element
Dependencies are inferred from the claim text.