Apparatus and method for abrading a workpiece
AssigneeNovellus Systems, Inc.
InventorsAleksander Zelenski, Sergey Cheprasov
Life of this patent
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Abstract
An apparatus for abrading a workpiece comprises a first plate assembly having a first surface for supporting a workpiece and a second plate assembly having a second surface for engaging the workpiece to abrade a portion thereof. A displacement shaft is mounted for movement with respect to the upper and lower plate assemblies and has a first end configured to engage the upper plate assembly. A feedback assembly is coupled to the displacement shaft for moving the displacement shaft to substantially maintain a predetermined load exerted on the displacement shaft by the upper plate assembly.
Claims28
An apparatus for abrading a workpiece, the apparatus comprising:
- a first plate assembly having a first surface far supporting a workpiece;
- a second plate assembly having a second surface for engaging the workpiece to abrade a portion thereof;
- a displacement shalt mounted for movement with respect to said second plate assembly and said first plate assembly and having a first end configured to engage said second plate assembly;
- and
- a feedback assembly coupled to a second end of said displacement shaft, said feedback assembly comprising a pressure sensor configured to sense the load applied to said displacement shaft by said second plate assembly, said feedback assembly configured to move said displacement shaft to substantially maintain a predetermined load exerted on said displacement shaft by said second plate assembly.
An apparatus for abrading a workpiece, the apparatus comprising:
- a frame;
- a carriage slidably mounted an said frame;
- a drive mechanism coupled to said carriage for moving said carriage substantially vertically;
- a lower plate assembly having an upper working surface for supporting the workpiece;
- an upper abrading plate assembly having a lower working surface for abradingly engaging the workpiece;
- a displacement shaft having upper and lower ends and slidingly mounted for vertical movement with respect to said upper plate assembly and said lower plate assembly, said upper end configured to engage said upper plate assembly;
- a feedback assembly comprising a pressure sensor coupled to the lower end of said displacement shaft for sensing the load applied to said displacement shaft by said upper plate assembly, said feedback assembly configured to move said displacement shaft to substantially maintain a predetermined load;
- and
- a displacement measuring assembly coupled to said feedback assembly for measuring the movement of said displacement shaft.
Dependencies are inferred from the claim text.