Mirror support mechanism and optical apparatus using the same
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsTakeharu Oshima, Noboru Ito
Life of this patent
Estimating the term…
Abstract
A fluid pressure support mechanism has a container in which fluid pressure is applied and fluid tubes are connected to the fluid pressure support mechanisms and to a fluid pressure control unit in such a way as to make all the fluid pressure support mechanisms communicate with each other, then a fluid pressure control unit applies the fluid pressure to the containers in the respective fluid pressure support mechanisms via the fluid tubes and controls the fluid pressure, and an electrically attractive actuator translates a mirror in an axial direction with one degree of freedom for translation by attracting force produced by a driven member and an electromagnet.
Claims6
A mirror support mechanism comprising:
- a mirror cell provided at the back of a mirror;
- a plurality of fluid pressure support mechanisms provided between the mirror cell and the mirror and applying support pressure to the mirror by respective containers having their volume changed by fluid pressure;
- an electromagnetic attracting type actuator including
- a rod connected to the mirror,
- a driven member mounted on the rod and driven by electromagnetic force,
- an electromagnet provided opposite to the driven member, and
- a container provided between the rod and the mirror cell and having its volume changed by the fluid pressure;
- a fluid pressure control unit that controls the fluid pressure applied to the respective containers in the plurality of fluid pressure support mechanisms and the fluid pressure applied to the container in the electromagnetic attracting type actuator;
- and
- fluid tubes connected to the respective containers in the fluid pressure support mechanisms and to the fluid pressure control unit in such a way as to make the containers communicate with each other.
An optical apparatus comprising:
- a plurality of segment mirrors;
- a mirror cell provided at the backs of the plurality of segment mirrors;
- fluid pressure support mechanisms each of which is provided between the mirror cell and at least one of the segment mirrors and applies support pressure to the at least one of the segment mirrors by respective containers having their volume changed by fluid pressure;
- an electromagnetic attracting type actuator including
- a rod connected to at least one of the segment mirrors,
- a driven member mounted on the rod and driven by electromagnetic force,
- an electromagnet provided opposite to the driven member, and
- a container provided between the rod and the mirror cell and having its volume changed by the fluid pressure;
- and
- a fluid pressure control unit that controls the fluid pressure applied to the containers in the fluid pressure support mechanisms and the fluid pressure applied to the container in the electromagnetic attracting type actuator;
- and
- fluid tubes connected to the respective containers in the fluid pressure support mechanisms and to the fluid pressure control unit in such a way as to make the containers communicate with each other.
A mirror support mechanism comprising:
- a mirror cell provided at the back of a mirror;
- a plurality of fluid pressure support mechanisms that are provided between the mirror cell and the mirror and applies support pressure to the mirror by respective containers having their volume changed by fluid pressure;
- an electromagnetic attracting type actuator including
- a rod connected to the mirror,
- a driven member mounted on the rod and driven by electromagnetic force, and
- an electromagnet provided opposite to the driven member;
- fluid pressure control unit that controls the fluid pressure applied to the respective containers in the plurality of fluid pressure support mechanisms;
- and
- fluid tubes connected to the respective containers in the fluid pressure support mechanisms and to the fluid pressure control unit in such a way as to make the containers communicate with each other.
Dependencies are inferred from the claim text.