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US 7,125,104 B2Granted
Liquid-discharging head, liquid-discharging device, and method of producing the liquid-discharging head
AssigneeSony Corporation
InventorManabu Tomita
Life of this patent
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Abstract
The present invention is applicable to, for example, a thermal printing head to form shallow grooves M by removing the insulating films 21, 24, 30, and 33 along at least the rows of the energy transducers.
Claims3
A method for manufacturing a liquid-ejecting head for ejecting droplets by driving energy transducers, comprising:
- a forming step of forming a row of a plurality of the energy transducers on a semiconductor substrate;
- a cutting step of cutting the semiconductor substrate along the row of the energy transducers to form a head chip;
- an assembling step of assembling the head chip into the liquid-ejecting head;
- a removing step of removing an insulating film for forming a groove on the head chip parallel to at least a side face along which the energy transducers are provided before the cutting step;
- and
- an annealing step for relieving residual stress in the insulating film.
3 more elements
Dependencies are inferred from the claim text.