Drawing device, electro-optical unit, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorTakahiro Usui
Life of this patent
Estimating the term…
Abstract
A drawing device is provided that applies drawing liquid containing a drawing material dissolved or dispersed in a solvent onto a substrate. The drawing device includes a liquid drop emitter having a liquid drop ejection head that ejects the drawing liquid onto the surface of the substrate, a substrate stage having the substrate mounted thereon, moving means for relatively moving the liquid drop ejection head or the substrate stage, and control means for controlling at least one of the liquid drop ejection head and the substrate stage. A wall is disposed on at least one of the liquid drop ejection head and the substrate stage to prevent the solvent from flowing out.
Claims4
A drawing device for applying drawing liquid containing a drawing material dissolved or dispersed in a solvent onto a substrate comprising:
- a liquid drop emitter having a liquid drop ejection head selectively ejecting the drawing liquid onto the substrate;
- a substrate stage having the substrate mounted thereon;
- moving means for relatively moving the liquid drop ejection head or the substrate stage;
- control means for controlling at least one of the liquid drop ejection head and the substrate stage;
- solvent outflow prevention means for preventing the solvent from flowing out, the solvent outflow prevention means disposed on at least one of the liquid drop ejection head and the substrate stage;
- and
- a solvent reservoir disposed on a part of the stage to evaporate a solvent.
A drawing device for applying drawing liquid containing a drawing material dissolved or dispersed in a solvent onto a substrate comprising:
- a liquid drop emitter having a liquid drop ejection head selectively ejecting the drawing liquid onto the substrate;
- a substrate stage having the substrate mounted thereon;
- moving means for relatively moving the liquid drop ejection head or the substrate stage;
- control means for controlling at least one of the liquid drop ejection head and the substrate stage;
- and
- solvent outflow prevention means for preventing the solvent from flowing out, the solvent outflow prevention means disposed on at least one of the liquid drop ejection head and the substrate stage,
- wherein a vapor of the solvent is heavier than air and the solvent outflow prevention means is a wall extending around the substrate stage.
Dependencies are inferred from the claim text.