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US 7,124,647 B2Granted
Slotted flow restrictor for a mass flow meter
AssigneeCelerity, Inc.
InventorsStuart A. Tison, Guanghua Wu, Tracy Gill, Vincent Lopez
Life of this patent
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Abstract
A flow restrictor (30) for a mass flow metering device formed of a solid material and slots (32) originating from an outer surface towards inward.
Claims26
A flow restrictor comprising:
- a material, wherein the material has a first end and a second end;
- and
- a first slot having a depth that extends from an outer surface of the material to a location closer to a center point within the material and a length that extends from the first end to the second end, wherein the first end and the second end are substantially flat;
- wherein the first slot has an aspect ratio of at least approximately 5:1.
1 more element
An apparatus comprising:
- a first flow path;
- and
- a flow restrictor lying within a first portion of the first flow path, wherein the flow restrictor comprises:
- a material, wherein the material has a first end and a second end;
- and
- a first slot having a depth that extends from an outer surface of the material to a location closer to a center point within the material and a length that extends from the first end to the second end, wherein the first and the second end are substantially flat;
- wherein the first slot has aspect ratio of at least approximately 5:1.
4 more elements
A mass flow apparatus comprising:
- a first flow path;
- a flow restrictor lying within a first portion of the first flow path, wherein the flow restrictor comprises:
- a material that has a substantially smooth outer surface, a first end positioned upstream in said first flow path, a second end, a substantially cross-sectional area, and a plurality of slots, wherein each of the slots has a depth that extends from the outer surface of the material towards a center point of the cross-sectional area and a length that extends from the first end to the second end of the material, and wherein the first end and the second end are substantially flat;
- and
- a second flow path that comprises a second portion that provides for a parallel flow path to the first portion of the first flow path within the mass flow controller, wherein the second flow path is smaller than the first flow path and is coupled to a sensor;
- wherein wire lengths lie between an inner wall of the first flow path and the flow restrictor.
3 more elements
A flow restrictor comprising:
- a material, wherein the material has a circular cross-sectional area and a first end and a second end;
- a plurality of slots substantially identical to one another and having a depth that extends from an outer surface of the material to a location closer to a center point within the material in a direction that is not normal to the outer surface, and a length that extends from the first end to the second end, wherein the first end and the second end are substantially flat.
Dependencies are inferred from the claim text.