Pressure sensor with non-planar membrane

Abstract

A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber partially defined by a flexible membrane (20), the chamber containing a fluid at a reference pressure, such that the flexible membrane (20) deflects due to pressure differentials between the reference pressure and the fluid pressure; and, associated circuitry for converting the deflection of the flexible membrane (20) into an output signal indicative of the fluid pressure; wherein, the membrane (20) is non-planar (22, 24). It is possible to extend the linear range of the pressure-deflection response with a non-planar membrane (20). Corrugations, a series of raised annuli (22) or other surface features are an added complexity in the fabrication process but can extend the linear range of the sensor by 1 MPa.

Dependencies are inferred from the claim text.