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US 7,124,638 B2Granted
Pressure sensor and method for detecting an effective pressure
AssigneeInfineon Technologies AG
InventorMichael Kandler
Life of this patent
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Abstract
A pressure sensor for detecting an effective pressure comprises a first pressure detection means for providing a first pressure measurement signal and a second pressure detection means for providing a second pressure measurement signal, wherein the first pressure measurement signal differs from the second pressure measurement signal, as well as an evaluation means for determining the effective pressure based on the first and the second pressure measurement signal. Thereby it is achieved that in a pressure measurement the measurement errors are reduced.
Claims18
A pressure sensor for detecting an effective pressure, comprising:
- a first pressure detection means for providing a first pressure measurement signal, which depends on the effective pressure and has a first dependence on an interference;
- a second pressure detection means for providing a second pressure measurement signal, which depends on the effective pressure and has a second dependence on the interference, which differs from the first dependence;
- and
- an evaluation means for determining the effective pressure based on the first and second pressure measurement signals, the first interference dependence and the second interference dependence,
- wherein the first pressure detection means has a first membrane and the second pressure detection means has a second membrane;
- wherein the first pressure detection means is formed to provide the first pressure measurement signal based on a deformation of the first membrane,
- wherein the second pressure detection means is formed to provide the second pressure measurement signal based on a deformation of the second membrane,
- wherein a first elastic material of a first density is disposed over the first membrane, and wherein a second elastic material of a second density is disposed over the second membrane,
- wherein the first dependence depends on a thickness of the first elastic material and the first density and wherein the second dependence depends on a thickness of the second elastic material and the second density;
- and
- wherein the first density is different from the second density and/or the thickness of the first elastic material is different from the thickness of the second elastic material.
8 more elements
A chip with a pressure sensor for detecting an effective pressure, comprising:
- a first pressure detection means for providing a first pressure measurement signal, which depends on the effective pressure and has a first interfering dependence on an interference;
- a second pressure detection means for providing a second pressure measurement signal, which depends on the effective pressure and has a second interfering dependence on the interference, which differs from the first interfering dependence,
- wherein the first and second pressure measurement means are integrated on the chip;
- and
- an interface for communicating with an evaluation means, arranged external to the chip, for determining the effective pressure based on the first and second pressure measurement signals, the first interfering dependence and the second interfering dependence,
- wherein the first pressure detection means has a first membrane and the second pressure detection means has a second membrane;
- wherein the first pressure detection means is formed to provide the first pressure measurement signal based on a deformation of the first membrane,
- wherein the second pressure detection means is formed to provide the second pressure measurement signal based on a deformation of the second membrane,
- wherein a first elastic material of a first density is disposed over the first membrane, and wherein a second elastic material of a second density is disposed over the second membrane,
- wherein the first interfering dependence depends on a thickness of the first elastic material and the first density, and wherein the second interfering dependence depends on a thickness of the second elastic material and the second density;
- and
- wherein the first density is different from the second density or the thickness of the first elastic material is different from the thickness of the second elastic material.
9 more elements
A method for detecting an effective pressure, comprising:
- generating, in a first pressure detection means, a first pressure measurement signal, which depends on the effective pressure and has a first interfering dependence on an interference;
- generating, in a second pressure detection means, a second pressure measurement signal, which depends on the effective pressure and which has a second interfering dependence on the interference;
- wherein the first pressure detection means has a first membrane and the second pressure detection means has a second membrane;
- wherein the first pressure detection means is formed to provide the first pressure measurement signal based on a deformation of the first membrane,
- wherein the second pressure detection means is formed to provide the second pressure measurement signal based on a deformation of the second membrane,
- wherein a first elastic material of a first density is disposed over the first membrane, and wherein a second elastic material of a second density is disposed over the second membrane,
- wherein the first interfering dependence depends on a thickness of the first elastic material and the first density and wherein the second interfering dependence depends on a thickness of the second elastic material and the second density;
- and
- wherein the first density is different from the second density or the thickness of the first elastic material is different from the thickness of the second elastic material;
- and
- determining the effective pressure based on the first and second pressure measurement signals, the first interfering dependence and the second interfering dependence.
8 more elements
Dependencies are inferred from the claim text.