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AssigneeSemrock, Inc.
InventorsTuran Erdogan, Joseph T. Foss, Ligang Wang
Estimating the term…
High performance optical edge and notch filters and methods of making the same are disclosed. The multi-layer, thin-film optical edge filters have an edge steepness greater than about 0.8% as measured by dividing (a) the edge width from the 50% transmission wavelength to the optical density 6 (“OD6”) wavelength by (b) the 50% transmission wavelength. The optical edge filters also have an average transmission above about 95%. The notch filters exhibit a blocking of OD>6, very high transmission (>90%) outside the notch(es), and a narrow notch bandwidth comparable to that of holographic notch filters. The methods for making such filters accurately determine when deposition of each layer of the filter should terminate.
A method for depositing a layer of material onto a substrate in order to manufacture a notch filter, the method comprising the steps of:
A method for making a notch filter using an apparatus, the filter designed to have N layers, and the method comprising the steps of:
A multi-layer, thin-film optical filter that blocks light at a particular wavelength (λL) with an optical density greater than 6, wherein the filter exhibits transmission greater than 90% and less than or equal to approximately 100% at wavelengths that are greater than or equal to λL+1.3 (Notch Bandwidth) and less than or equal to λL−1.3(Notch Bandwidth) and wherein Notch Bandwidth (“NBW”) is defined as:
A multi-layer, thin-film optical filter that blocks light at a particular wavelength (λL) with an optical density greater than 6, wherein the filter exhibits transmission greater than 90% and less than or equal to approximately 100% at wavelength between (λL+0.65(NBW)) and λL/0.75, and between 0.75(λL) and (λL−0.65(NBW)), and wherein NBW is defined as:
A multi-layer, in-film optical filter that blocks light at a particular wavelength (λL) with an optical density greater than 6, wherein the filter exhibits transmission greater than 90% and less than or equal to approximately 100% at wavelengths between (λL+1.3(NBW)) and λL/0.75, and between 0.75(λL) and (λL−1.3(NBW)), and wherein NBW is defined as:
A multi-layer, thin-film optical filter that blocks light at a particular wavelength (λL) with an optical density greater than 6, wherein the filter exhibits transmission greater than 90% and less than or equal to approximately 100% at wavelengths that are greater than or equal to λL+0.65(NBW), and less than or equal to λL−0.65(NBW), and wherein NBW is defined as:
A multi-layer, thin-film optical filter that, when operated at an angle of incidence of approximately 45 degrees, blocks light of all polarizations at a particular wavelength (λL) with an optical density greater than 5 and exhibits transmission greater than 90% and less than or equal to approximately 100% at wavelengths that are greater than or equal to λL+1.3(NBW) and less than or equal to λL−1.3(NBW), wherein NBW is defined as:
An optical analysis system for exciting a sample of material with light of a first waelength to produce a measurable or viewable optical response at a second wavelength diffrent from the first, the system comprising a source of excitation light, an optical path coupling the excitation light to the sample, an optical path coupling light from the sample to an analyzer or viewer, and a filter in the path between the sample and the analyzer or viewer for blocking some light other than the optical response at the second wavelength.
Dependencies are inferred from the claim text.