Methods and apparatus for calibration and metrology for an integrated RF generator system

An RF plasma generation system comprising:

• an impedance matching network having a fixed impedance during operation of the system and having an input, to receive an RF signal from an RF generator, and an output, to deliver the RF signal to an input of a plasma vessel associated with a load;
• a signal probe in electromagnetic communication with the input of the impedance matching network to detect at least one parameter associated with the RF signal at the input of the impedance matching network;
• a calibration storage unit comprising calibration data that associates,
• i) values of the at least one RF signal parameter associated with the input port of the impedance matching network, with,
• ii) values of at least one characteristic of the load;
• and
• a control unit to determine an association between the detected at least one RF signal parameter and a monitored value of the at least one characteristic of the load by referencing the calibration data.

An RF plasma generation system comprising:

• an impedance matching network having a fixed impedance during operation of the system and having an input, to receive an RF signal from an RF generator, and an output, to deliver the RF signal to an input of a plasma vessel associated with a load;
• a signal probe in electromagnetic communication with the input of the impedance matching network to detect at least one parameter associated with the RF signal at the input of the impedance matching network;
• a calibration storage unit comprising calibration data that associates,
• i) values of the at least one RF signal parameter associated with the input port of the impedance matching network, with,
• ii) values of at least one characteristic of the load;
• and
• means for determining an association between the detected at least one RF signal parameter and a monitored value of the at least one characteristic of the load by referencing the calibration data.