Method for forming a write head having air bearing surface (ABS)
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsQuang Le, Edward Hin Pong Lee, Jui-Lung Li, Aron Pentek, Nian-Xiang Sun
Life of this patent
Estimating the term…
Abstract
A method and materials to fabricate a trailing shield write pole that resolve the problems of controlling the write gap and preventing damages to the write gap or pole during fabrication of the subsequent structure. This process also introduces a CMP assisted lift-off process to remove re-deposition and fencing (increase yields) and a method to create dishing in the top of the write pole. Moreover, also included in this disclosure are suitable materials that can function as an ion mill transfer layer, CMP layer, and RIEable layer.
Claims31
A method for forming a write head having an air bearing surface (ABS), comprising:
- forming a flux shaping layer;
- forming a pole tip layer on the shaping layer, the shaping layer being for focusing flux to the pole tip layer;
- forming a mask layer above the pole tip layer, the mask layer being more resistant to milling than the pole tip layer;
- forming a layer of resist above the mask layer;
- patterning the resist, the patterned resist defining about a maximum width of the pole tip in a direction parallel to the ABS of the head;
- removing portions of the mask layer not covered by the patterned resist;
- milling for shaping a pole tip from the pole tip layer;
- depositing a layer of dielectric material above the pole tip and flux shaping layer, wherein the layer of dielectric material extends about adjacent to the mask layer;
- depositing a stop layer over the dielectric material, the stop layer abutting the mask layer;
- polishing for forming a substantially planar upper surface consisting of the mask layer and stop layer;
- forming a gap layer above the pole tip to a desired thickness;
- and
- forming a trailing shield above the gap layer.
A method for forming a write head having an air bearing surface (ABS), comprising:
- forming a flux shaping layer;
- forming a pole tip layer on the shaping layer, a mask layer being formed above the pole tip layer;
- shaping a tapered pole tip from the pole tip layer;
- depositing a layer of dielectric material above the pole tip and flux shaping layer, wherein the layer of dielectric material extends about adjacent to the mask layer;
- depositing a stop layer over the dielectric material, the stop layer abutting the mask layer;
- polishing for forming a substantially planar upper surface consisting of the mask layer and stop layer;
- and
- forming a gap layer above the pole tip to a desired thickness.
A method for forming a write head having an air bearing surface (ABS), comprising:
- forming a flux shaping layer;
- forming a pole tip layer on the shaping layer, a mask layer being formed above the pole tip layer;
- shaping a tapered pole tip from the pole tip layer;
- depositing a layer of dielectric material above the pole tip and flux shaping layer, wherein the layer of dielectric material extends about adjacent to the mask layer;
- depositing a stop layer over the dielectric material, the stop layer abutting the mask layer;
- polishing for forming a substantially planar upper surface consisting of the mask layer and stop layer;
- removing the mask layer;
- forming dishing in the pole tip;
- forming a gap layer above the pole tip to a desired thickness;
- and
- forming a trailing shield above the gap layer.
Dependencies are inferred from the claim text.