Wiring graphic verification method, program and apparatus

A computer-aided wiring graphic verification method for verifying wiring intervals and wiring widths in wiring graphic data for wiring masks including vertical and horizontal wiring and slanted wiring created from layout data for semiconductor integrated circuit designing, the method comprising:

• an edge extraction step, by an edge extraction unit, extraction vertical and horizontal wiring edges and slanted wiring edges from overall wiring graphics;
• a wiring width classification step, by a wiring width classification unit, executing a scaling process for the overall wiring graphics and classifying the wiring graphics into wiring width ranges which are divided by a predefined reference wiring width;
• a vertical and horizontal wiring edge extraction step, by a vertical and horizontal wiring edge extraction unit, extracting the vertical and horizontal wiring edges which are in contact with graphics classified into the wiring width ranges;
• a vertical and horizontal wiring interval verification step, by a vertical and horizontal wiring interval verification unit, verifying intervals between the vertical and horizontal wiring edges and opposed edges to be verification counterparts based on a vertical and horizontal reference interval for each wiring width range;
• a slanted wiring edge extraction step, by a slanted wiring edge extraction unit, extracting slanted wiring edges which are in contact with graphics classified into the wiring width ranges;
• a slanted wiring interval verification step, by a slanted wiring interval verification unit, verifying intervals between the slanted wiring edges and opposed edges to be verification counterparts based on a slanted reference interval for each wiring width range;
• a minimum wiring width extraction step, by a minimum wiring width extraction unit, extracting wiring graphics less than a predefined minimum wiring width through a scaling process for the overall wiring graphics;
• a minimum wiring width verification step, by a minimum wiring width verification unit, extracting vertical and horizontal wiring graphics which are in contact with the vertical and horizontal wiring edges and slanted wiring graphics which are in contact with the slanted wiring edges out of the wiring graphics less than the minimum width, and outputting minimum wiring with errors;
• a maximum wiring width extraction step, by a maximum wiring width extraction unit, extraction wiring graphics greater than predefined maximum width through a scaling process for the overall wiring graphics;
• and
• a maximum wiring width verification step, by a maximum wiring width verification unit, extracting vertical and horizontal wiring graphics which are in contact with the vertical and horizontal wiring edges and slanted wiring graphics which are contact with the slanted wiring edges out of the wiring graphics greater than the maximum width, and outputting maximum wiring width errors.

A program stored on a computer readable storage for allowing a computer to execute:

• an edge extraction step extracting vertical and horizontal wiring edges and slanted wiring edges from overall wiring graphics;
• a wiring width classification step executing a scaling process for the overall wiring graphics and classifying the wiring graphics into wiring width ranges which are divided by a predefined reference wiring width;
• a vertical and horizontal wiring edge extraction step extracting the vertical and horizontal wiring edges which are in contact with graphics classified into the wiring width ranges;
• a vertical and horizontal wiring interval verification step verifying intervals between the vertical and horizontal wiring edges and opposed edges to be verification counterparts based on a vertical and horizontal reference interval for each wiring width range;
• a slanted wiring edge extraction step extracting slanted wiring edges which are in contact with graphics classified into the wiring width ranges;
• and
• a slanted wiring interval verification step verifying intervals between the slanted wiring edges and opposed edges to be verification counterparts based on a slanted reference interval for each wiring width range.

A program stored on a computer readable storage for allowing a computer to execute:

• an edge extraction step extracting vertical and horizontal wiring edges and slanted wiring edges from overall wiring graphics;
• a wiring width classification step executing a scaling process for the overall wiring graphics and classifying the wiring graphics into wiring width ranges which are divided by a predefined reference wiring width;
• a vertical and horizontal wiring edge extraction step extracting the vertical and horizontal wiring edges which are in contact with graphic classified into the wiring width ranges;
• a vertical and horizontal wiring interval verification step verifying intervals between the vertical and horizontal wiring edges and opposed edges to be verification counterparts based on a vertical and horizontal reference interval for each wiring width range;
• a slanted wiring edge extraction step extracting slanted wiring edges which are in contact with graphics classified into the wiring width ranges;
• a slanted wiring interval verification step verifying intervals between the slanted wiring edges and opposed edges to be verification counterparts based on a slanted reference interval for each wiring width range;
• a minimum wiring width extraction step extracting wiring graphics less than a predefined minimum wiring width through a scaling process for the overall wiring graphics;
• a minimum wiring width verification step extracting vertical and horizontal wiring graphics which are in contact with the vertical and horizontal wiring edges and slanted wiring graphics which are in contact with the slanted wiring edges out of the wiring graphics less than the minimum width, and outputting minimum wiring width errors;
• a maximum wiring width extraction step extracting wiring graphics greater than predefined maximum width through a scaling process for the overall wiring graphics;
• and
• a maximum wiring width verification step extracting vertical and horizontal wiring graphics which are in contact with the vertical and horizontal wiring edges and slanted wiring graphics which are contact with the slanted wiring edges out of the wiring graphics greater than the maximum width, and outputting maximum wiring width errors.

A computer-aided wiring graphic verification apparatus for verifying wiring intervals in wiring graphic data for wiring masks including vertical and horizontal wiring and slanted wiring created from layout data for a circuit design, the apparatus comprising:

• an edge extraction unit extracting vertical and horizontal wiring edges and slanted wiring edges from overall wiring graphics;
• a wiring width classification unit executing a scaling process for the overall wiring graphics and classifying the wiring graphics into wiring width ranges which are divided by a predefined reference wiring width;
• a vertical and horizontal wiring edge extraction unit extracting the vertical and horizontal wiring edges which are in contact with graphics classified into the wiring width ranges;
• a vertical and horizontal wiring interval verification unit verifying intervals between the vertical and horizontal wiring edges and opposed edges to be verification counterparts based on a vertical and horizontal reference interval for each wiring width range;
• a slanted wiring edge extraction unit extracting slanted wiring edges which are in contact with graphics classified into the wiring width ranges;
• and
• a slanted wiring interval verification unit verifying intervals between the slanted wiring edges and opposed edges to be verification counterparts based on a slanted reference interval for each wiring width range.

A computer-aided wiring graphic verification apparatus for verifying wiring intervals and wiring widths in wiring graphic data for wiring masks including vertical and horizontal wirings and slanted wirings created from layout data for semiconductor integrated circuit designing, the apparatus comprising:

• an edge extraction unit extracting vertical and horizontal wiring edges and slanted wiring edges from overall wiring graphics;
• a wiring width classification unit executing a scaling process for the overall wiring graphics and classifying the wiring graphics into wiring width ranges which are divided by a predefined reference wiring width;
• a vertical and horizontal wiring edge extraction unit extracting the vertical and horizontal wiring edges which are in contact with graphics classified into the wiring width ranges;
• a vertical and horizontal wiring interval verification unit verifying intervals between the vertical and horizontal wiring edges and opposed edges to be verification counterparts based on a vertical and horizontal reference interval for each wiring width range;
• a slanted wiring edge extraction unit extracting slanted wiring edges which are in contact with graphics classified into the wiring width ranges;
• a slanted wiring interval verification unit verifying intervals between the slanted wiring edges and opposed edges to be verification counterparts based on a slanted reference interval for each wiring width range;
• a minimum wiring width extraction unit extracting wiring graphics less than a predefined minimum wiring width through a scaling process for the overall wiring graphics;
• a minimum wiring width verification unit extracting vertical and horizontal wiring graphics which are in contact with the vertical and horizontal wiring edges and slanted wiring graphics which are in contact with the slanted wiring edges out of the wiring graphics less than the minimum width, the minimum wiring width verification unit outputting minimum wiring width errors;
• a maximum wiring width extraction unit extracting wiring graphics greater than predefined maximum width through a scaling process for the overall wiring graphics;
• and
• a maximum wiring width verification unit extracting vertical and horizontal wiring graphics which are in contact with the vertical and horizontal wiring edges and slanted wiring graphics which are contact with the slanted wiring edges out of the wiring graphics greater than the maximum width, the maximum wiring width verification unit outputting maximum wiring width errors.