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US 7,120,511 B1Granted
Method and system for scheduling maintenance procedures based upon workload distribution
AssigneeAdvanced Micro Devices, Inc.
InventorsTroy Anthony Tanzer, Elizabeth Weaver
Life of this patent
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Abstract
The present invention is generally directed to various methods and systems for scheduling maintenance procedures based upon workload distribution. In one illustrative embodiment, the method includes providing a tool, identifying a planned processing schedule for processing a plurality of wafer lots in the tool, and providing a controller that schedules a time for a maintenance procedure to be performed on the tool based upon the planned processing schedule of the plurality of wafer lots.
Claims19
A method, comprising:
- providing a tool;
- identifying a planned processing schedule for processing a plurality of wafer lots in said tool;
- providing a controller that schedules a time for a maintenance procedure to be performed on said tool based upon said planned processing schedule of said plurality of wafer lots by identifying a number of potential conflicts between the maintenance procedure and the processing of said wafer lots at a plurality of times and selecting one of the times for scheduling the maintenance procedure based on the number of potential conflicts at the associated times.
A method, comprising:
- providing a tool;
- identifying a planned processing schedule for processing a plurality of wafer lots in said tool;
- providing a controller that changes a previously scheduled time for a maintenance procedure to be performed on said tool based upon said planned processing schedule of said plurality of wafer lots, wherein the controller identifies a number of potential conflicts between the maintenance procedure and the processing of said wafer lots at the previously scheduled time and at a plurality of other times and selects one of the other times having fewer potential conflicts than the previously scheduled time;
- and
- performing said maintenance procedure on said tool at said changed time.
2 more elements
Dependencies are inferred from the claim text.