Resonator for thermo optic device

A method, comprising:

• providing a substrate;
• forming a cladding on the substrate, the cladding having a surface;
• forming a depression in the cladding;
• coating the surface and the depression with a material;
• removing some of the material thereby forming a resonator in the depression, the resonator extending above the surface;
• and
• forming a waveguide on the surface.

A method, comprising:

• forming a cladding having a surface;
• forming a plurality of depressions in the cladding;
• depositing a refractive material in the depressions and on the surface;
• and
• forming a plurality of resonators in the plurality of depressions by selectively removing the refractive material on the surface around the depressions and leaving refractive material in the depressions and extending above the surface over the depressions.

A method, comprising:

• providing a substrate;
• forming a cladding on the substrate, the cladding having a surface;
• forming a depression in the cladding;
• forming one of a first resonator and a first waveguide in the depression and extending above the surface to a height;
• and
• forming one of a second resonator and a second waveguide on the surface and adjacent to the first resonator extending above the surface.

A method, comprising:

• providing a substrate;
• forming a cladding on the substrate, the cladding having a surface;
• forming a trench in the cladding;
• forming a resonator in the trench and extending above the surface;
• forming a waveguide on the surface wherein the waveguide and the resonator have an upper surface that is substantially coplanar;
• and
• forming an upper cladding over the resonator and the waveguide.

A method, comprising:

• providing a substrate;
• forming a cladding on the substrate, the lower cladding having a surface;
• forming a plurality of trenches in the lower cladding;
• forming a plurality of resonators in the plurality of trenches, the resonators being formed having a height which extends above the surface;
• forming a plurality of waveguides on the surface wherein the plurality of waveguides and the plurality of resonators each have an upper surface that is substantially coplanar;
• and
• forming an upper cladding over the plurality of resonators and the plurality of waveguides.

A method, comprising:

• providing a substrate;
• depositing a first layer on the substrate, the first layer having a surface;
• photomasking the first layer;
• etching the first layer to form a depression in the first layer, the depression having a bottom;
• depositing a second layer over the first layer and the depression;
• photomasking the second layer;
• etching the second layer to form a resonator in the depression and an input and output waveguide on the surface wherein the resonator and the input and output waveguides each have an upper surface that is substantially coplanar and the resonator extending from the bottom of the depression to a height above the surface;
• and
• depositing a third layer over the resonator and the input and output waveguides to form a device.

A method, comprising:

• providing a silicon substrate;
• depositing a first silicon oxide on the silicon substrate, the first silicon oxide having a surface;
• photomasking the first silicon oxide;
• etching the first silicon oxide to form a trench therein;
• depositing a silicon oxynitride over the first silicon oxide and the trench;
• photomasking the silicon oxynitride;
• etching the silicon oxynitride to form a resonator in the trench and an input and output waveguide on the surface wherein the resonator and the input and output waveguides each have an upper surface that is substantially coplanar the resonator extending from a bottom of the trench to a height above the surface;
• and
• depositing a second silicon oxide over the resonator and the input and output waveguides to form a thermo optical waveguide, wherein the first and second silicon oxides have an index of refraction that is substantially equal and the silicon oxynitride has an index of refraction that is substantially different than the substantially equal index of refraction for the first and second silicon oxides.

An apparatus, comprising:

• a cladding having a depression therein;
• a first portion of a resonator in the depression and a second portion of the resonator extending above a surface of the cladding;
• and
• a waveguide extending up from the surface of the cladding adjacent to the second portion of the resonator.

An apparatus, comprising:

• a substrate
• a cladding on the substrate having a depression and a surface;
• a resonator in the depression extending up from a bottom of the depression to a height above the surface;
• and
• a waveguide on the surface extending up from the surface and adjacent to the resonator.

An optic device, comprising:

• a cladding having a trench extending down below a surface of the cladding;
• a resonator in the trench extending from a bottom of the trench to a height above the surface;
• and
• a waveguide on the surface extending to the height above the surface.

An apparatus, comprising:

• a base cladding having a surface and a plurality of depressions therein extending from the surface to a bottom below the surface;
• a plurality of resonators in the plurality of depressions, each resonator located a unique one of the plurality of depressions, each resonator extending from the bottom below the surface to a height above the surface;
• and
• a plurality of waveguides located on the surface and extending to the height above the surface.

A thermo optic device, comprising:

• a substrate;
• a lower cladding on the substrate having a depression therein and a surface;
• one of a resonator and a waveguide deposited and etched in the depression and the other of the resonator and the waveguide deposited and etched on the surface wherein an upper surface of each of the resonator and the waveguide is substantially coplanar and of equal height extending above the surface;
• and
• an upper cladding on the resonator and the waveguide.

A thermo optical waveguide, comprising:

• a substrate;
• a lower cladding on the substrate having a plurality of depressions therein and a surface;
• a plurality of resonators in the plurality of depressions, the plurality of depressions being equal in number to the plurality of resonators and extending from a bottom of the depressions to a height above the surface;
• an input and output waveguide on the surface wherein an upper surface of each of the plurality of resonators and the input and output waveguides is substantially coplanar;
• and
• an upper cladding on the plurality of resonators and the input and output waveguides.

A thermo optic device, comprising:

• a substrate;
• a first layer on the substrate, the first layer having a depression therein and a surface;
• a second layer, a first portion of the second layer deposited and etched in the depression and extending from below the surface to a height above the surface;
• a second portion of the second layer deposited and etched on the surface and extending from the surface to the height above the surface;
• and
• a third layer deposited on the surface of the first layer and deposited over the first and second portions of the second layer wherein the first and third layers each have an index of refraction that is substantially equal to one another, wherein the second layer has an index of refraction that is one of substantially higher and substantially lower than the substantially equal indices of refraction for the first and second layers.

A thermo optical waveguide, comprising:

• a substrate;
• a lower cladding on the substrate having a plurality of trenches therein and a surface;
• a plurality of resonators in the plurality of trenches, the plurality of trenches being equal in number to the plurality of resonators, the plurality of resonators extending from a bottom of the plurality of the trenches to a height above the surface;
• an input and output waveguide on the surface wherein an upper surface of each of the plurality of resonators and the input and output waveguides is substantially coplanar and equal to the height;
• and
• an upper cladding on the plurality of resonators and the input and output waveguides wherein the upper and lower cladding each have an index of refraction that is substantially equal to one another, wherein the plurality of resonators and input and output waveguides each have an index of refraction that is one of substantially higher and substantially lower than the substantially equal indices of refraction for the upper and lower cladding.

A thermo optical waveguide, comprising:

• a silicon substrate;
• a first silicon oxide on the substrate having a plurality of trenches therein and a surface;
• a plurality of resonators in the plurality of trenches formed of a silicon oxynitride, the plurality of trenches being equal in number to the plurality of resonators and the resonators extending from the bottom of the trenches to a height above the surface;
• an input and output waveguide on the surface formed of a silicon oxynitride wherein an upper surface of each of the plurality of resonators and the input and output waveguides is substantially coplanar and equal to the height;
• and
• a second silicon oxide on the plurality of resonators and the input and output waveguides wherein the first and second silicon oxides each have an index of refraction that is substantially equal to one another, wherein the plurality of resonators and input and output waveguides each have an index of refraction that is substantially equal to one another and one of substantially higher and substantially lower than the substantially equal indices of refraction for the first and second silicon oxide.

A system having a fiber optic line, comprising:

• a package coupleable with the fiber optic line;
• and
• a device in the package having
• a base cladding having a depression and a surface;
• a resonator located in the depression and extending from a bottom of the trench to a height above the surface;
• and
• a waveguide on the surface and extending from the surface to the height.

A package, comprising:

• a device having:
• i) a base cladding having a depression and a surface;
• ii) a resonator located in the depression and extending from a bottom of the depression to a height above the surface;
• and
• iii) a waveguide on the surface and extending from the surface to the height above the surface.