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US 7,120,335 B2Granted
Vertically and laterally confined 3D optical coupler
AssigneeMassachusetts Institute of Technology
InventorsAnuradha M. Agarwal, Lionel C. Kimerling, Hermann A. Haus, Kazumi Wada, Steven G. Johnson, Christina Manolatou, Jurgen Michel, Victor Trinh Nguyen
Life of this patent
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Abstract
An on-chip silicon-based optical coupler used to guide light from an optical fiber to a waveguide. The incoming wave is confined vertically by stacks of graded index materials. In the lateral direction, a linear taper formed by etched holes or trenches confines the wave.
Claims16
An optical coupler used to guide light from an optical fiber to a waveguide comprising:
- a cladding layer;
- a width taper region comprising a vertical stack of varying refractive index layers, wherein the layers gradually increase in refractive index from a top layer to a center layer and then decrease from the center layer to a bottom layer formed on the cladding layer;
- at least one pair of horizontally spaced trenches or periodic holes in the vertical stack that increase in dimensions from said optical coupler to said waveguide so as to form a width tapered shape in the stack so as to allow a plurality of modes to be present in said optical coupler.
A method of producing an optical coupler used to guide light from an optical fiber to a waveguide, the method comprising:
- providing a cladding layer;
- forming a taper region comprising a vertical stack of varying refractive index layers by depositing layers of varying refractive index material on the cladding layer, wherein the layers gradually increase in refractive index from a top layer to a center layer and then decrease from the center layer to a bottom layer;
- etching at least one pair of horizontally spaced trenches or periodic holes in the vertical stack that increase in dimensions from the said optical coupler to said waveguide so as to form a width tapered shape in the stack so as to allow a plurality of modes to be present in said optical coupler.
Dependencies are inferred from the claim text.