Optical device and production method thereof

An optical device comprising an actuator structure,

• wherein the actuator structure comprises:
• a substrate having a first surface, a second surface opposing the first surface, and an end surface intersecting with the first surface and the second surface;
• a stationary electrode provided on the first surface of the substrate;
• a movable electrode provided on the first surface of the substrate and provided with a portion extending out from the end face of the substrate, the movable electrode having a lower surface facing the first surface and an upper surface opposing the lower surface;
• an optical element provided on the upper surface of the portion of the movable electrode extending out from the end face of the substrate;
• and
• an optical waveguide optically coupled to the optical element,
• wherein a region in the vicinity the movable electrode where the optical element is provided is immersed in a matching oil, and
• wherein the matching oil is provided at least between the optical waveguide and the optical element and between the movable electrode and a hole portion.

A method of producing an optical device, the method comprising:

• a step of providing a stationary electrode on a first surface of a substrate, the substrate having the first surface and a second surface opposing the first surface;
• a step of providing a movable electrode on the first surface of the substrate so that the movable electrode has a lower surface facing the first surface and an upper surface opposing the lower surface;
• a step of providing an optical element on the upper surface of the movable electrode;
• a step of forming a hole portion in the substrate so that the hole portion provides a space which extends in a direction from the first surface to the second surface and provides the first surface with an opening, where the substrate has a part facing the movable electrode;
• and
• a step of immersing a region in the vicinity of the movable electrode where the optical element is provided, in a matching oil.

A method of producing an optical device, the method comprising:

• a step of providing a stationary electrode on a first surface of a substrate, the substrate having the first surface, a second surface opposing the first surface, and an end surface intersecting with the first surface and the second surface;
• a step of providing a movable electrode on the surface of the substrate so as to have a portion extending out from the end face of the substrate and have a lower surface facing the first surface and an upper surface opposing the lower surface;
• a step of providing an optical element on the upper surface of the movable electrode;
• a step of immersing a region near the movable electrode where the optical element is provided, in a matching oil;
• and
• a step of providing an optical waveguide optically coupled to the optical element,
• wherein the matching oil is provided at least between the optical waveguide and the optical element and between the movable electrode and a hole portion.