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US 7,119,944 B2Granted
Micromirror device and method for making the same
AssigneeReflectivity, INC
InventorsSatyadev Patel, Andrew Huibers, Jonathan Doan, James Dunphy, Dmitri Simonian, Hongqin Shi, Jianglong Zhang
Life of this patent
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Abstract
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Claims38
A micromirror device, comprising:
- a substrate;
- a mirror plate;
- a deformable hinge disposed in the same plane as the mirror plate and connected to the mirror plate such that the mirror plate is movable relative to the substrate;
- first and second posts positioned proximate to the mirror plate for holding the mirror plate on the substrate, wherein the first and second posts are disposed such that a line connecting the first and second posts is not coincident with a diagonal of the mirror plate;
- a semiconductor substrate having thereon an addressing electrode for addressing and deflecting the mirror plate, wherein the semiconductor substrate supports the first and second posts;
- and
- wherein the mirror plate and/or the deformable hinge comprises single crystal silicon.
4 more elements
Dependencies are inferred from the claim text.