Side spring micro-mirror
AssigneeNorthrop Gruman Corporation
InventorsHarvey C. Nathanson, Robert S. Howell, Garrett A. Storaska, John B. Goodell, Stephen D. Vancampen
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AssigneeNorthrop Gruman Corporation
InventorsHarvey C. Nathanson, Robert S. Howell, Garrett A. Storaska, John B. Goodell, Stephen D. Vancampen
Estimating the term…
A micro-electrical mechanical system (MEMS) mirror assembly including an array of micro-mirrors formed on a substrate and having springs on one side and which angularly tilt between ON and OFF states in response to an electrostatic force generated by a voltage applied to an electrode located on the substrate. At least one, but preferably two springs in the form of two thin strips of metal attach to post(s) at the side edge of the mirror and act as springs which provide a restoring force when the mirror is tilted between an OFF state which occurs when the mirror is flat relative to the substrate with no voltage applied, and in the ON state when the mirror is tilted when a voltage is applied.
A micro-mirror for use in a MEMS mirror array comprising:
A deflectable mirror element for an array of mirror elements, comprising:
Dependencies are inferred from the claim text.