Back to results
US 7,119,650 B2Granted
Integrated transformer
AssigneeIntel Corporation
InventorDonald S. Gardner
Life of this patent
Estimating the term…
Abstract
A transformer comprises a first inductor and a second inductor. The first inductor has one or more trenches and comprises a first conductor defining a signal path along the one or more trenches of the first inductor. The second inductor has one or more trenches and comprises a second conductor defining a signal path along the one or more trenches of the second inductor.
Claims7
A method, comprising:
- forming a first inductor in a first dielectric layer over a substrate, the first inductor having an at least one trench, the at least one trench having a pair of walls and a bottom;
- forming a first conductor over the first inductor, the first conductor defining a first signal path along the pair of walls and the bottom of the dielectric layer;
- forming a first magnetic layer over the dielectric layer, the first magnetic layer defining a second signal path parallel to the first signal path;
- forming a second inductor in the dielectric layer over the substrate, the second inductor having an at least one trench, the at least one trench having a pair of walls and a bottom;
- forming a second conductor over the second inductor, the second conductor defining a third signal path along the pair of walls and the bottom of the dielectric layer;
- forming a second magnetic layer over the dielectric layer, the second magnetic layer defining a fourth signal path parallel to the third signal path.
3 more elements
Dependencies are inferred from the claim text.