US 7,119,566 B2 · Test probe alignment apparatus

Abstract

A test probe alignment apparatus includes a rotatable θ stage that is decoupled from a workpiece positioning stage so that the workpiece positioning stage can move a workpiece in an X-Y plane without moving the θ stage, thereby inhibiting vibration in and inertia of the workpiece positioning stage, and improving the speed and accuracy of workpiece movements. The θ stage is driven for rotation about an axis substantially perpendicular to the X-Y plane. The rotatable stage supports a carriage adapted for holding a probe card. The carriage rotates in concert with the θ stage to thereby align the probe card relative to the workpiece. A Z-stage is operatively engaged with the carriage for moving the carriage along the axis of rotation relative to the workpiece. A computer processor performs coordinate transformations on preprogrammed movement vectors, to adjust for angular misalignment of the workpiece as measured by a position sensor.

Claims21

Dependent claims

A test probe alignment apparatus for aligning a set of test probes with contact areas on a substrate, the substrate being supported on a chuck adjacent the test probe alignment apparatus and driven for movement in a plane, comprising:

a rotatable stage having an axis of rotation substantially perpendicular to the plane of movement of the chuck, the rotatable stage decoupled from the chuck so that the chuck can move in the plane without moving the rotatable stage therewith;
a carriage supported on the rotatable stage for rotation therewith, the carriage adapted to support the set of test probes;
and
a translating stage operatively engaged with the carriage and driven for linear translation of the carriage relative to the rotatable stage along the axis of rotation of the rotatable stage, to thereby move the test probes into engagement with the contact areas,
rotation of the rotatable stage causing the set of test probes to rotate around the axis of rotation for aligning the test probes with the contact areas before moving the test probes into engagement with the contact areas.

2 more elements

A probe alignment apparatus for aligning a set of probes with contact areas on a substrate, the substrate being supported on an independently movable X-Y stage separate from the probe alignment apparatus and driven for movement in a plane, comprising:

a θ stage having an axis of rotation substantially perpendicular to the plane of movement of the X-Y stage, the θ stage decoupled from the X-Y stage so that movement of the X-Y stage does not impart movement to the θ stage and movement of the θ stage does not impart movement to the X-Y stage;
a carriage coupled to the θ stage for rotation therewith, the carriage adapted to support the set of probes;
and
a Z-stage operatively engaged with the carriage to drive the carriage linearly relative to the θ stage along the axis of rotation of the θ stage, to thereby move the probes into engagement with the contact areas,
rotation of the θ stage causing the set of probes to rotate around the axis of rotation for aligning the probes with the contact areas before moving the probes into engagement with the contact areas.

2 more elements

An alignment apparatus, comprising:

a workpiece positioning stage including a chuck for supporting a substrate thereon, the workpiece positioning stage being adjustable for movement in a plane and constrained to prevent rotational movement of the chuck;
a rotatable stage separate from the workpiece positioning stage and having an axis of rotation substantially perpendicular to the plane of movement of the workpiece positioning stage, each of the rotatable stage and the workpiece positioning stage being independently adjustable without imparting movement to the other;
a tool supported on the rotatable stage for rotation therewith;
and
a translating stage operatively engaged with the tool and driven for linear translation of the tool relative to the rotatable stage along the axis of rotation of the rotatable stage,
rotation of the rotatable stage causing the tool to rotate around the axis of rotation for aligning the tool with the substrate.

3 more elements

Dependencies are inferred from the claim text.

Test probe alignment apparatus

Life of this patent

Test probe alignment apparatus

Life of this patent

Abstract

Claims21