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US 7,119,547 B2Granted
Testing apparatus
AssigneeAdvantest Corporation
InventorsKunihiro Matsuura, Hiroki Ando, Hironori Tanaka, Yasuhiro Urabe, Satoshi Kodera
Life of this patent
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Abstract
A testing apparatus includes a first power supply unit and first and second coaxial cables. The first power supply supplies current to a device under test. The first coaxial cable includes a first internal conductor and a first external conductor. The second coaxial cable includes a second internal conductor and a second external conductor. The first internal conductor and the second external conductor conducts current from the first power supply unit to the device under test. The second internal conductor and the first external conductor conducts current from the device under test to the first power supply unit.
Claims8
A testing apparatus for testing a device under test by supplying a current to said device under test, comprising:
- a first power supply unit for generating a current to be supplied to said device under test;
- and
- first and second coaxial cables through which said current generated by said first power supply unit is supplied to said device under test,
- wherein said first power supply unit comprises:
- a current detecting unit for detecting an amount of a voltage drop when said current generated by said first power supply unit passes through a predetermined resistor;
- and
- a current controlling unit for controlling said current being supplied to said device under test in response to said amount of said voltage drop detected by said current detecting unit,
- said first coaxial cable comprises:
- a first internal conductor for conducting said current from said first power supply unit towards said device under test;
- and
- a first external conductor provided around said first internal conductor with an insulator interposed therebetween for conducting said current from said device under test towards said first power supply unit, and
- said second coaxial cable comprises:
- a second internal conductor for conducting said current from said device under test towards said first power supply unit;
- and
- a second external conductor around said second internal conductor with an insulator interposed therebetween for conducting said current from said first power supply unit towards said device under test, wherein
- said first internal conductor, said first external conductor, said second internal conductor, and said second external conductor are connected to said device under test.
13 more elements
A testing apparatus for testing a device under test by supplying a current to said device under test, comprising:
- a first power supply unit for generating a current to be supplied to said device under test;
- and
- first and second coaxial cables through which said current generated by said first power supply unit is supplied to said device under test;
- wherein said first power supply unit comprises:
- a current detecting unit for detecting an amount of a voltage drop when said current generated by said first power supply unit passes through a predetermined resistor;
- and
- a current controlling unit for controlling said current being supplied to said device under test in response to said amount of said voltage drop detected by said current detecting unit,
- said first coaxial cable comprises:
- a first internal conductor for conducting said current from said first power supply unit towards said device under test;
- and
- a first external conductor provided around said first internal conductor with an insulator interposed therebetween for conducting said current from said device under test towards said first power supply unit, and
- said second coaxial cable comprises:
- a second internal conductor for conducting said current from said device under test towards said first power supply unit;
- and
- a second external conductor around said second internal conductor with an insulator interposed therebetween for conducting said current from said first power supply unit towards said device under test, wherein
- said first internal and second external conductors are coupled in parallel to each other and conduct said current from said first power supply unit towards said device under test, and
- said first external and second internal conductors are coupled in parallel to each other and conduct said current from said device under test towards said first power supply unit.
14 more elements
A testing apparatus for testing a device under test by supplying a current to said device under test, comprising:
- a first power supply unit for generating a current to be supplied to said device under test;
- and
- first and second coaxial cables through which said current generated by said first power supply unit is supplied to said device under test
- wherein said first power supply unit comprises:
- a current detecting unit for detecting an amount of a voltage drop when said current generated by said first power supply unit passes through a predetermined resistor;
- and
- a current controlling unit for controlling said current being supplied to said device under test in response to said amount of said voltage drop detected by said current detecting unit,
- said first coaxial cable comprises:
- a first internal conductor for conducting said current from said first power supply unit towards said device under test;
- and
- a first external conductor provided around said first internal conductor with an insulator interposed therebetween for conducting said current from said device under test towards said first power supply unit, and
- said second coaxial cable comprises:
- a second internal conductor for conducting said current from said device under test towards said first power supply unit;
- and
- a second external conductor around said second internal conductor with an insulator interposed therebetween for conducting said current from said first power supply unit towards said device under test;
- the test apparatus further comprising:
- a second power supply unit with a same configuration as that of said first power supply unit for generating a current to be supplied to said device under test;
- third and fourth coaxial cables through which said current generated by said second power supply unit is supplied to said device under test;
- a multi-layer substrate on which said first and second power supply units are provided;
- a first wiring pattern formed at said multi-layer substrate for electrically coupling said first power supply unit to said first and second coaxial cables;
- and
- a second wiring pattern formed at said multi-layer substrate for electrically coupling said second power supply unit to said third and fourth coaxial cables,
- wherein said third coaxial cable comprises:
- a third internal conductor for conducting said current from said second power supply unit towards said device under test;
- and
- a third external conductor provided around said third internal conductor with an insulator interposed therebetween for conducting said current from said device under test towards said second power supply unit,
- said fourth coaxial cable comprises:
- a fourth internal conductor for conducting said current from said device under test towards said second power supply unit;
- and
- a fourth external conductor provided around said fourth internal conductor with an insulator interposed therebetween for conducting said current from said second power supply unit towards said device under test,
- said first wiring pattern comprises:
- a first feed pattern formed at a layer of said multi-layer substrate for conducting said current from said first power supply unit towards said first internal and second external conductors;
- and
- a first ground pattern for conducting said current from said first external and second internal conductors towards said first power supply unit, said first ground pattern being formed at a layer of said multi-layer substrate adjacent to said layer in order that said first ground pattern faces said first feed pattern, said first ground pattern having a same width as that of said first feed pattern, and
- said second wiring pattern comprises:
- a second feed pattern formed at a layer of said multi-layer substrate for conducting said current from said second power supply unit towards said third internal and fourth external conductors;
- and
- a second ground pattern for conducting said current from said third external and fourth internal conductors towards said second power supply unit, said second ground pattern being formed at a layer of said multi-layer substrate adjacent to said layer in order that said second ground pattern faces said second feed pattern, said second ground pattern having a same width as that of said second feed pattern.
35 more elements
Dependencies are inferred from the claim text.